Hostname: page-component-cd9895bd7-fscjk Total loading time: 0 Render date: 2024-12-27T18:45:47.847Z Has data issue: false hasContentIssue false
  • English
  • Français

Non-lithographic Patterning of Oxide-Embedded Silicon Nanoparticles

Published online by Cambridge University Press:  01 June 2011

José R. Rodríguez Núñez ,
Melanie Johnson  and
Jonathan G. C. Veinot
José R. Rodríguez Núñez
Affiliation:
Department of Chemistry, 11227 Saskatchewan Drive, University of Alberta, Edmonton, Alberta, T6G 2G2, Canada.
Melanie Johnson
Affiliation:
Department of Chemistry, 11227 Saskatchewan Drive, University of Alberta, Edmonton, Alberta, T6G 2G2, Canada.
Jonathan G. C. Veinot
Affiliation:
Department of Chemistry, 11227 Saskatchewan Drive, University of Alberta, Edmonton, Alberta, T6G 2G2, Canada.
Get access

Abstract

Oxide-embedded Silicon nanoparticles (OE-Si-NPs) are of great interest for many applications due to unique size effects observed when their size drops below 5 nm (Silicon’s Bohr exciton radius). Some of the suggested applications require patterning of the nanoparticles in an ordered array. Lithographic methods to pattern Si-NPs are common in the literature, however these methods can be costly, and are not time-efficient. Recently, non-lithographic patterning techniques have become very attractive because they are cost-effective and straightforward. In this proceeding we will demonstrate non-lithographic patterning of OE-Si-NPs characterized via AFM and XPS.

Keywords

Sinanoscalepolymer
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1359: Symposium NN – Electronic Organic and Inorganic Hybrid Nanomaterials—Synthesis, Device Physics and Their Applications , 2011 , mrss11-1359-nn10-03
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Nirmal, M. and Brus, L., “Luminescence photophysics in semiconductor nanocrystals,” Acc.Chem.Res. 32 (5), 407–414 (1999).Google Scholar
2. Alivisatos, A. P., “Perspectives on the physical chemistry of semiconductor nanocrystals,” J.Phys.Chem. 100 (31), 13226–13239 (1996).Google Scholar
3. Alivisatos, A. P., Gu, W. and Larabell, C., “Quantum dots as cellular probes,” Annual Review of Biomedical Engineering 7, 55–76 (2005).Google Scholar
4. Kazes, M., Lewis, D. Y. and Banin, U., “Method for preparation of semiconductor quantum-rod lasers in a cylindrical microcavity,” Advanced Functional Materials 14 (10), 957–962 (2004).Google Scholar
5. Minot, E. D. et al. ., “Single quantum dot nanowire LEDs,” Nano Letters 7 (2), 367–371 (2007).Google Scholar
6. Lewinski, N., Colvin, V. and Drezek, R., “Cytotoxicity of nanopartides,” Small 4 (1), 26–49 (2008).Google Scholar
7. Fan, J. and Chu, P. K., “Group IV nanoparticles: Synthesis, properties, and biological applications,” Small 6(19), 2080–2098 (2010).Google Scholar
8. Paniccia, M. and Koehl, S., “The silicon solution,” IEEE Spectrum 42(10), 30–35 (2005).Google Scholar
9. Guarini, K. W. et al. ., in Technical Digest - International Electron Devices Meeting, Anonymous 2003) pp. 541–544.Google Scholar
10. Seo, I. et al. ., “Selective incorporation of colloidal nanocrystals in nanopatterned SiO 2 layer for nanocrystal memory device,” Electrochemical and Solid-State Letters 13(3), K19–K21 (2010).Google Scholar
11. Black, C. T. et al. ., “Polymer self assembly in semiconductor microelectronics,” IBM Journal of Research and Development 51(5), 605–633 (2007).Google Scholar
12. Yinghong, Q., Dong, W. and Buriak, J. M., “Block copolymer templated etching on silicon,” Nano Letters 7(2), 464–469 (2007).Google Scholar
13. Pettigrew, K. A. et al. ., “Solution Synthesis of Alkyl- and Alkyl/Alkoxy-Capped Silicon Nanoparticles via Oxidation of Mg2Si,” Chemistry of Materials 15(21), 4005–4011 (2003).10.1021/cm034403kGoogle Scholar
14. Hessel, C. M., Henderson, E. J. and Veinot, J. G. C., “Hydrogen silsesquioxane: A molecular precursor for nanocrystalline Si-SiO2 composites and freestanding hydride-surface-terminated silicon nanoparticles,” Chemistry of Materials 18(26), 6139–6146 (2006).Google Scholar
15. Veinot, J. G. C., “Synthesis, surface functionalization, and properties of freestanding silicon nanocrystals,” Chemical Communications (40), 4160-4168 (2006).Google Scholar
16. Henderson, E. J., Kelly, J. A. and Veinot, J. G. C., “Influence of HSiO1.5 sol-gel polymer structure and composition on the size and luminescent properties of silicon nanocrystals,” Chemistry of Materials 21 (22), 5426–5434 (2009).Google Scholar
17. Rodríguez, J. and Veinot, J. G. C., “Realization of sensitized erbium luminescence in Si-nanocrystal composites obtained from solution processable sol-gel derived materials,” Journal of Materials Chemistry 21 (6), 1713–1720 (2011).Google Scholar
18. Iacona, F. et al. ., “Silicon-based light-emitting devices: Properties and applications of crystalline, amorphous and er-doped nanoclusters,” IEEE Journal on Selected Topics in Quantum Electronics 12 (6), 1596–1605 (2006).Google Scholar
19. Hessel, C. M., Henderson, E. J. and Veinot, J. G. C., “An investigation of the formation and growth of oxide-embedded silicon nanocrystals in hydrogen silsesquioxane-derived nanocomposites,” Journal of Physical Chemistry C 111 (19), 6956–6961 (2007).Google Scholar