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Optimization of Textured Tco Substrates for a-Si Solar Cells

Published online by Cambridge University Press:  25 February 2011

Mitsuhiko Komakine ,
Hiromichi Nishimura ,
Yoshio Gotoh ,
Kazuo Sato  and
Kei Kondo
Mitsuhiko Komakine
Affiliation:
Advanced Glass Research and Development Center, Asahi Glass Co., Ltd. Yokohama 221, Japan.
Hiromichi Nishimura
Affiliation:
Advanced Glass Research and Development Center, Asahi Glass Co., Ltd. Yokohama 221, Japan.
Yoshio Gotoh
Affiliation:
Advanced Glass Research and Development Center, Asahi Glass Co., Ltd. Yokohama 221, Japan.
Kazuo Sato
Affiliation:
Advanced Glass Research and Development Center, Asahi Glass Co., Ltd. Yokohama 221, Japan.
Kei Kondo
Affiliation:
Advanced Glass Research and Development Center, Asahi Glass Co., Ltd. Yokohama 221, Japan.
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Abstract

Textured TCO (Sn02:F) substrates were fabricated using atmospheric pressure CVD (APCVD). Various kinds of TCO developed were classified into three types (A, B, C) in terms of shape of texture, electrical and optical properties. TCO substrates of type A with low carrier concentration and pyramidal texture fulfill the conflicting properties of low absorption and low resistivity after hydrogen plasma treatment. By using type A TCO substrates, the highest conversion efficiencies of 12 % for a small area of 1cm×1cm as a-Si single junction solar cell were certified by several related NEDO research organizations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 192: Symposium O – Amorphous Silicon Technology - 1990 , 1990 , 69
Copyright
Copyright © Materials Research Society 1990

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References

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