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Preparation of Microcrystalline Silicon Based Solar Cells at High i-layer Deposition Rates Using a Gas Jet Technique

Published online by Cambridge University Press:  17 March 2011

S.J. Jones
Affiliation:
Energy Conversion Devices, Inc., Troy, MI 48084
R. Crucet
Affiliation:
Energy Conversion Devices, Inc., Troy, MI 48084
X. Deng
Affiliation:
Energy Conversion Devices, Inc., Troy, MI 48084
D.L. Williamson
Affiliation:
Colorado School of Mines, Golden, CO 80401
M. Izu
Affiliation:
Energy Conversion Devices, Inc., Troy, MI 48084
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Abstract

A Gas Jet technique has been used to prepare microcrystalline silicon (μc-Si) thin films at deposition rates as high as 20 Å/s. The films have microcrystal sizes between 80 and 120 Å with a heterogeneous microstructure containing regions with columnar growth and other regions with a more randomly oriented microstructure. These materials have been used as i-layers for nip single-junction solar cells. The high deposition rates allow for fabrication of the required thicker μc-Si i-layers in a similar amount of time to those used for high quality a-SiGe:H i-layers (rates of 1-3 Å/s). Using a 610nm cutoff filter which only allows red light to strike the device, pre-light soaked short circuit currents of 8-10 mA/cm2 and 2.7% red-light efficiencies have been obtained while AM1.5 white light efficiencies are above 7%. These efficiencies are higher than those typically obtained for μc-Si cells prepared at the high i-layer growth rates using other deposition techniques. After 1000 h. of light soaking, the efficiencies on average degrade only by 2-5% (stabilized efficiencies of 2.6%) consistent with the expected high stability with the microcrystalline materials. The small amount of degradation compares with the 15-17% degradation in efficiencies for a-SiGe:H cells subjected to similar irradiation treatments (final light-soaked red light efficiencies of 3.2%). Improvements in the cell efficiencies may come through an understanding of the role that columnar microstructure and void structure plays in determining the device performance.

Type
Research Article
Copyright
Copyright © Materials Research Society 2000

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References

REFERENCES

1. Meier, J., Keppner, H., Dubail, S., Kroll, U., Torres, P., Pernet, P., Ziegler, Y., Selvan, J.A. Anna, Cuperus, J., Fischer, D., Shah, A., Mat. Res. Soc. Symp. Proc. 507, 139 (1998).Google Scholar
2. Jones, S., Crucet, R., Deng, X., Doehler, J., Myatt, A., Mat. Res. Soc. Symp. Proc. 557, 567 (1999).Google Scholar
3. Williamson, D.L., Mat. Res. Soc. Symp. Proc. 377, 251 (1995).Google Scholar
4. Jones, S., Chen, Y., Williamson, D., Zedlitz, R., Bauer, G., Appl. Phys. Lett. 62(25), 3267 (1993).Google Scholar
5. Torres, P., Meier, J., Kroll, U., Beck, N., Keppner, H., Shah, A., 26th IEEE Photo. Sp.Con.,711(1997).Google Scholar
6. Saito, K., Sano, M., Matuda, K., Proc. 2nd World Conf. Exh. PV Solar En. Conv., 351 (1998).Google Scholar