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Preparation of PbZrxTi1−xO3 Thin Films by KrF Excimer Laser Ablation Technique

Published online by Cambridge University Press:  10 February 2011

Hiromitsu Kurogi ,
Yukihiko Yamagata ,
Tomoaki Ikegami ,
Kenji Ebihara  and
Bok Yin Tong
Hiromitsu Kurogi
Affiliation:
Department of Electrical Engineering and Computer Science, Kumamoto University, 2–39–1 Kurokami, Kumamoto 860, Japan, Kurogi@eecs.Kumamoto-u.ac.jp
Yukihiko Yamagata
Affiliation:
Department of Electrical Engineering and Computer Science, Kumamoto University, 2–39–1 Kurokami, Kumamoto 860, Japan, Kurogi@eecs.Kumamoto-u.ac.jp
Tomoaki Ikegami
Affiliation:
Department of Electrical Engineering and Computer Science, Kumamoto University, 2–39–1 Kurokami, Kumamoto 860, Japan, Kurogi@eecs.Kumamoto-u.ac.jp
Kenji Ebihara
Affiliation:
Department of Electrical Engineering and Computer Science, Kumamoto University, 2–39–1 Kurokami, Kumamoto 860, Japan, Kurogi@eecs.Kumamoto-u.ac.jp
Bok Yin Tong
Affiliation:
Faculty of Science, The University of Western Ontario, London, Ontario, Canada
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Abstract

Pb(ZrxTi1−x)O3(PZT) thin films have excellent ferroelectric, optical, piezoelectric and pyroelectric properties. We prepared PZT thin films using the excimer laser ablation technique. A pulsed KrF excimer laser was used to ablate PZT bulk targets. We have studied optimum preparation conditions such as an oxygen pressure, a laser energy fluence and a substrate temperature.

In this paper, we investigated the composition, crystallization and ferroelectric properties of the PZT films prepared under various deposition conditions.

The X-ray diffraction (XRD) patterns showed that the PZT films prepared on MgO(100) substrates at 600°C and with a laser fluence of 2J/cm2 had a perovskite - pyrochlore mixed structure. The condition of 100 mTorr oxygen pressure provided high quality perovskite films. It is found that the stoichiometric composition of the deposited films is obtained in ambient oxygen of 100˜400 mTorr. The ferroelectric properties of the Pt/PZT/Pt/MgO structure were studied. The capacitance-voltage characteristics and the corresponding hysteresis loop of the dielectric-electric field curve were discussed.

We also studied optical emission of the PZT plasma plume to understand quantitative relation between the PZT film quality and the ablation plume plasma. We identified spectral lines originated in Pb, Pb+, Zr, Zr+, Ti, Ti+, PbO and TiO. These spectral intensities have remarkable dependence on the ambient O2 pressure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 237
Copyright
Copyright © Materials Research Society 1996

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