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Pulsed Beams and Ion-Beam Mixing: Metal-Si and Metalmetal Structures

Published online by Cambridge University Press:  15 February 2011

J. W. Mayer ,
R. Fastow ,
G. Galvin ,
L. S. Hung ,
M. Nastasi ,
M. O. Thompson  and
L. R. Zheng
J. W. Mayer
Affiliation:
Dept. of Materials Science, Bard Hall, Cornell University, Ithaca, NY 14853
R. Fastow
Affiliation:
Dept. of Materials Science, Bard Hall, Cornell University, Ithaca, NY 14853
G. Galvin
Affiliation:
Dept. of Materials Science, Bard Hall, Cornell University, Ithaca, NY 14853
L. S. Hung
Affiliation:
Dept. of Materials Science, Bard Hall, Cornell University, Ithaca, NY 14853
M. Nastasi
Affiliation:
Dept. of Materials Science, Bard Hall, Cornell University, Ithaca, NY 14853
M. O. Thompson
Affiliation:
Dept. of Materials Science, Bard Hall, Cornell University, Ithaca, NY 14853
L. R. Zheng
Affiliation:
Dept. of Materials Science, Bard Hall, Cornell University, Ithaca, NY 14853
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Abstract

Energy deposition and heat-flow determine the temperature distributions in pulsed-beam irradiated structures. In laser irradiated Si, transient conductance measurements indicated a liquid/solid interface velocity of 2.8 m/sec during crystallization in agreement with a heat flow model. With pulsed ionbeam annealing of metal-Si structures, melting starts at the interface; epitaxial NiSi2 layers have been formed. Ion-beammixing experiments on polycrystalline and epitaxial Au-Ag bilayers show that intermixing is more pronounced in the polycrystalline structures as is the case with thermal annealing. Superlattice structures are formed in the epitaxial structures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 7 , 1981 , 125
Copyright
Copyright © Materials Research Society 1982

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References

REFERENCES

1.Galvin, G. J., Thompson, M. O., Mayer, J. W., Hammond, R. B., Paulter, N. and Peercy, P. S., submitted for publication.Google Scholar
2.Farber, T. E., “Theory of Liquid Metals,” Cambridge University Press, 1972.Google Scholar
3.Auston, D. H., Golovchenko, J. A., Smith, P. R., Surko, C. M. and Venkatesan, T. N. C., Appl. Phys. Lett. 33, 538 (1978).Google Scholar
4.White, C. W., Pronko, P. O., Wilson, S. R., Appleton, B. R., Narayan, J. and Young, R. T., J. Appl. Phys. 50, 3261 (1979).Google Scholar
5.Van Vechten, J. A., Tsu, R., Saris, F. W. and Hoonhout, D., Phys. Lett. 74a, 417 (1979).Google Scholar
6.Lo, H. W. and Compaan, A., Phys. Rev. Lett. 44, 604 (1980).Google Scholar
7.Stritzker, B., Pospieszczyk, A. and Tagle, J. A., Phys. Rev. Lett. 47, 356 (1981).Google Scholar
8.Liu, J. M., Yen, R., Kurz, H., and Bloembergen, N., Appl. Phys. Lett. 39, 755 (1981).Google Scholar
9.Thompson, M. O., to be published.Google Scholar
10.McCaldin, J. O., J. Vac. Sci. Technol. 16, 990 (1974).Google Scholar
11.Zheng, L. R. and Hung, L. S., to be published.Google Scholar
12.Fastow, R., to be published.Google Scholar
13.Lau, S. S., Tsaur, B. Y., Von Allmen, H., Mayer, J. W., Stritzker, B., White, C. W. and Appleton, B., Nucl. Instr. Meth. 182/183, 97 (1981).Google Scholar
14.Poate, J. H., Leamy, H. J., Sheng, T. T., and Celler, G. K., Appl. Phys. Lett. 33, 918 (1978).Google Scholar
15.Wittmer, M. and Von Allmen, H., J. Appl. Phys. 50, 4786 (1979).Google Scholar
16.Hodgson, R. T., Baglin, J. E. E., Pal, R., Neri, J. M. and Hammer, P. A., Appl. Phys. Lett. 36, 320 (1980).Google Scholar
17.Chen, L. J., Hung, L. S., Mayer, J. W., Baglin, J. E. E., Neri, J. H. and Hammer, D. A., Appl. Phys. Lett. (submitted).Google Scholar
18. Channeling measurements by Baglin, J. E. E..Google Scholar
19.Tsaur, B. Y., Lau, S. S., Hung, L. S. and Mayer, J. W., Nucl. Instr. Meth. 182/183, 67 (1981).Google Scholar
20.Baglin, J. E. E. and Poate, J. H. in: Thin-Films--Interdiffusion and Reacactions, Poate, J. M., Tu, K. N., and Mayer, J. W., ads. (John Wiley and Sons, 1978), Chapter 9.Google Scholar
21.Nastasi, M., to be published.Google Scholar
22.Tsaur, B. Y., Liau, Z. L. and Mayer, J. W., Appl. Phys. Lett. 34, 163 (1979).Google Scholar