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Quantitative Hrtem: Measuring Projected Potential, Surface Roughness and Chemical Composition

Published online by Cambridge University Press:  21 February 2011

P. Schwander ,
C. Kisielowski ,
F.H. Baumann ,
Y.O. Kim  and
A. Ourmazd
P. Schwander
Affiliation:
AT&T Bell Laboratories, Holmdel, New Jersey 07733, USA
C. Kisielowski
Affiliation:
AT&T Bell Laboratories, Holmdel, New Jersey 07733, USA
F.H. Baumann
Affiliation:
AT&T Bell Laboratories, Holmdel, New Jersey 07733, USA
Y.O. Kim
Affiliation:
AT&T Bell Laboratories, Holmdel, New Jersey 07733, USA
A. Ourmazd
Affiliation:
AT&T Bell Laboratories, Holmdel, New Jersey 07733, USA
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Abstract

We describe how general lattice images may be used to measure the variation of the potential in crystalline solids in any projection, with no knowledge of the imaging conditions. This approach is applicable to structurally perfect samples, in which interfacial topography, or changes in composition are of interest. We present the first atomic-level topographic map of a Si/SiO2 interface in plan-view, and the first microscopic compositional map of a Si/GeSi/Si quantum well in cross-section.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 332: Symposium U – Determining Nanoscale Physical Properties of Materials by Microscopy and Spectroscopy , 1994 , 373
Copyright
Copyright © Materials Research Society 1994

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References

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