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RF-Magnetron Sputtered Strontium Titanate: Structure, Processing and Property Relationships

Published online by Cambridge University Press:  10 February 2011

B.J. Gibbons ,
Y. Fan ,
A.T. Findikoglu ,
D.W. Reagor  and
Q.X. Jia
B.J. Gibbons
Affiliation:
Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM 87545, gibbons@lanl.gov
Y. Fan
Affiliation:
Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM 87545, gibbons@lanl.gov
A.T. Findikoglu
Affiliation:
Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM 87545, gibbons@lanl.gov
D.W. Reagor
Affiliation:
Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM 87545, gibbons@lanl.gov
Q.X. Jia
Affiliation:
Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM 87545, gibbons@lanl.gov
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Abstract

The low frequency dielectric properties of epitaxial SrTiO3 thin films deposited on LaAlO3 are presented. The films were deposited using radio-frequency magnetron sputtering from stoichiometric targets in an Ar/O2 atmosphere. For the first time, the effects of in situ ozone annealing during the early stages of deposition were explored. X-ray diffraction results indicated that the ozone treatment resulted in more symmetric and sharper diffraction peaks (2 Θ- FWHM decreased from 0.17° to 0.10°). In addition, the peaks for the ozone treated samples were shifted in 2 Θ towards values approaching the bulk value. Rutherford backscattering measurements showed Sr/Ti ratios of 1:1 for these samples, indicating these peak shifts are not due to compositional variations. The dielectric constant of the ozone treated samples increased from 275 at room temperature to 1175 at 22 K (measured at 100 kHz). The effective loss tangent of the device remained between 1 × 10−4 and 1 × 10−3 down to 100 K, where it began to increase. The tunability was also measured. The ozone treated sample showed tunability of 46%, 43% and 38% at 22 K, 40 K and 60 K, respectively. Finally, similar measurements were completed at 1 MHz, indicating a minimal dependence of these properties on frequencies in this range.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 603: Symposium KK – Materials Issues for Tunable RF & Microwave Devices , 1999 , 57
Copyright
Copyright © Materials Research Society 2000

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References

[1] Findikoglu, A. T., Jia, Q. X., Campbell, I. H., Wu, X. D., Reagor, D., Mombourquette, C. B. and McMurry, D., Appl. Phys. Lett., 66, p. 3674 (1995).10.1063/1.114137Google Scholar
[2] Li, H.-C., Si, W., West, A. D. and Xi, X. X., Appl. Phys. Lett., 73, p. 190 (1998).10.1063/1.121751Google Scholar
[3] Li, H.-C., Li, W., Wang, R.-L., Xuan, Y., Liu, B.-T. and Xi, X. X., Materials Science and Engineering B, 56, p. 218 (1998).10.1016/S0921-5107(98)00229-3Google Scholar
[4] Li, H.-C., Si, W., West, A. D. and Xi, X. X., Appl. Phys. Lett., 73, p. 464 (1998).10.1063/1.121901Google Scholar
[5] Selvaraj, U., Prasadarao, A. V., Komarneni, S. and Roy, R., Materials Letters, 23, p. 123 (1995).10.1016/0167-577X(95)00013-5Google Scholar
[6] Fröhlich, K., Machajdík, D., Rosová, A., Vávra, I., Weiss, F., Bochu, B. and Senateur, J. P., Thin Solid Films, 260, p. 187 (1995).10.1016/0040-6090(94)06507-1Google Scholar
[7] Kim, D.-W., Kim, D.-H., Kang, B.-S., Noh, T. W., Lee, D. R. and Lee, K.-B., Appl. Phys. Lett., 74, p. 2176 (1999).10.1063/1.123792Google Scholar
[8] Christen, H.-M., Mannhart, J. and Williams, E. J., Physical Review B, 49, p. 12095 (1994).10.1103/PhysRevB.49.12095Google Scholar
[9] Kozyrev, A. B., Samoilova, T. B., Golovkov, A. A., Hollmann, E. K., Kalinikos, D. A., Galt, D., Mueller, C. H., Rivkin, T. V. and Koepf, G. A., Journal of Applied Physics, 84, p. 3326 (1998).10.1063/1.368487Google Scholar
[10] Fuchs, D., Schneider, C. W., Schneider, R. and Rietschel, H., Journal of Applied Physics, 85, p. 7362 (1999).10.1063/1.369363Google Scholar
[ 11] Wang, X., Helmersson, U., Madsen, L. D., Ivanov, I. P., Münger, P., Rudner, S., Hjörvarsson, B. and Sundgren, J.-E., Journal of Vacuum Science and Technology A, 17, p. 564 (1999).10.1116/1.581619Google Scholar
[12] Eom, C. B., Sun, J. Z., Yamamoto, K., Marshall, A. F., Luther, K. E., Geballe, T. H. and Laderman, S. S., Appl. Phys. Lett., 55, p. 595 (1989).10.1063/1.102436Google Scholar
[13] Gevorgian, S., Carlsson, E., Rudner, S., Wernlund, L.-D., Wang, X. and Helmersson, U., IEE Proc.-Microw. Antennas Propag., 143, p. 397 (1996).10.1049/ip-map:19960595Google Scholar
[14] Jia, Q. X., Findikoglu, A. T., Reagor, D. and Lu, P., Appl. Phys. Lett., 73, p. 897 (1998).10.1063/1.122031Google Scholar
[15] Viana, R., Lunkenheimer, P., Hemberger, J., Böhmer, R. and Loidl, A., Physical Review B, 50, p. 601 (1994).10.1103/PhysRevB.50.601Google Scholar