Hostname: page-component-78c5997874-8bhkd Total loading time: 0 Render date: 2024-11-17T23:35:35.967Z Has data issue: false hasContentIssue false
  • English
  • Français

Small-Angle X-Ray Scattering from Light Emitting Porous Silicon and Siloxene

Published online by Cambridge University Press:  28 February 2011

H. Franz ,
V. Petrova-Koch ,
T. Muschik ,
V. Lehmann  and
J. Peisl
H. Franz*
Affiliation:
University of Munich, Sektion Physik, Munich, Germany
V. Petrova-Koch
Affiliation:
Technische Universität Munich, Garching, Germany
T. Muschik
Affiliation:
Technische Universität Munich, Garching, Germany
V. Lehmann
Affiliation:
Siemens AG, Munich, Germany.
J. Peisl
Affiliation:
University of Munich, Sektion Physik, Munich, Germany
*
a: new address: Instituto di Scienze Fisiche, Universita degli Studidi Ancona, Ancona, Italy
Get access

Abstract

We studied the microstructure of two types of light emitting porous silicon (PS), as-etched and rapid thermal oxidized and of material prepared according to the siloxene recipe by Small-Angle X-Ray Scattering (SAXS). In all three types of samples we found particles with nanometer dimensions. The average particle size in as-etched PS is ingood agreement with results achieved by TEM and X-ray diffraction. Shape analysis shows, that the PS skeleton consists of cylindrical shaped particles with an average heigth of 20Å and a diameter of 40 Å.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 283: Symposium F – Microcrystalline Semiconductors–Materials Science and Devices , 1992 , 133
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

LITERATURE

1: Canham, L. T., Appl. Phys. Lett. 57, 1046 (1990).Google Scholar
2: Brandt, M. S., Fuchs, H. D., Stutzmann, M., Weber, J. and Cardona, M., Solid State Commun. 81, (1992) 307.Google Scholar
3: Kautzky, H., Zocher, M. Z. Phys. 9 (1922) 267 Google Scholar
4: Prokes, S.M., Glembocki, O.J., Bermudez, V.M., Kaplan, R., Friedersdorf, L.E., P.C. Searson Phys. Rev. B 45(23) (1992) 13788 Google Scholar
5: Koch, F., Petrova-Koch, V., Muschik, T., Kux, A., Müller, F., Garrilenko, V., Möller, F. ISPS 21, Beijing 1992 Google Scholar
6: Hirabayashi, I., Morigaki, K., Yamanaka, S. J. Non-Cryst. Sol. 27&28 (1983) 645 Google Scholar
7: Ubara, H., Imura, T., Hiraki, A., Hirabalashi, I., Morigaki, K. J. Non-Cryst. Sol. 27&28 (1983) 641 Google Scholar
8: Petrova-Koch, V., Muschik, T., Kux, A., Meier, B.K., Koch, F., V. Lehmann Appl. Phys. Lett. 61 (1991) 943 Google Scholar
9: Shiba, K., Sakamoto, K., Miyazaki, S., Hirose, M. SSDM Tzukuba (1992) 699 Google Scholar
10: Vezin, V., Goudeau, P., Naudon, A., Halimaoui, A., Bomchil, G. Appl. Phys. Lett. 60(21) 2625 Google Scholar
11: Glatter, O., Kratky, O., ‘Small-Angle X-Ray Scattering’. Academic Press (1982)Google Scholar
12: Lehmann, V., Jobst, B., Muschik, T., Kux, A., Petrova-Koch, V. subm. to APl.Google Scholar