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Strategies for CMOS Low Equivalent Oxide Thickness Achievement with High-κ Oxides Grown on Si(001) by MBE
Published online by Cambridge University Press: 01 February 2011
Abstract
Amorphous LaAlO3 high-k oxide was grown in a molecular beam epitaxy reactor on p-Si(001) using a thin γ-Al2O3 epitaxied buffer layer. Interfaces were free of SiO2 or silicates and remained abrupt despite the high temperature used for annealing, as X-ray photoelectron spectroscopy showed. Electrical measurements performed on as-deposited samples revealed a dielectric constant value close to that of the bulk, small equivalent oxide thickness and low density of interface states. But some negative charges were present, leading to a flat band voltage shift. Post deposition annealing with forming gas can correct this effect.
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- Copyright © Materials Research Society 2008