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Structural and Substructural Analysis of Glass Surface

Published online by Cambridge University Press:  25 February 2011

Zenon BochyŃskia
Zenon BochyŃskia*
Affiliation:
Non-Crystalline Materials Division, Institute of Physics, Adam Mickiewicz University, 60–780 Poznań 2, Grunwaldzka 6, Poland.
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Abstract

A structure of surface and near surface layers in inorganic glasses used as substrated in metallization was studied. The analysed samples were made of melted quartz, technical and optical quartz glass and sodium-silicate glass.

The sample surface were at first treated mechanically ground and polished and then chemically etched.

In the investigation we applied the following methods:

- X-ray and electron/mean voltages 35…65 kV/diffraction,

- electron emission microscopy,

- optical/UV-VIS/and infrared/IR/microspectrophotometry and microscopy.

For the studied series of quartz based/SiO2/glasses we determined the size of inhomogeneous. regions and the distortion degree of the elementary tetrahedra/basic structural elements/and estimated the thickness of surface and near-surfaoe layers.

The obtained structural parameters enabled us to propose structural models of the surface of real glasses uaed in elec-trotechnology, electronics and microelectronics.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 181: Symposium B – Advanced Metallizations in Microelectronics , 1990 , 569
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

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