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Structural Characteristics of Carbon Nanorods and Nanotubes Grown Using Electron Cyclotron Resonance Chemical Vapor Deposition

Published online by Cambridge University Press:  15 February 2011

Y. S. Woo ,
I. T. Han ,
Y. J. Park ,
H. J. Kim ,
J. E. Jung ,
N. S. Lee ,
D. Y. Jeon  and
J. M. Kim
Y. S. Woo
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Taejon 305-701, Korea
I. T. Han
Affiliation:
FED project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea
Y. J. Park
Affiliation:
FED project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea
H. J. Kim
Affiliation:
FED project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea
J. E. Jung
Affiliation:
FED project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea
N. S. Lee
Affiliation:
Department of Nano Science and Technology, Sejong University, Seoul 143-747, Korea
D. Y. Jeon
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Taejon 305-701, Korea
J. M. Kim
Affiliation:
FED project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea
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Abstract

Vertically aligned carbon nanorods and multi walled carbon nanotubes (MWNTs) were synthesized by electron cyclotron resonance chemical vapor deposition (ECR-CVD) on Ni- coated glass substrates with the RF-self biasing of –100 and –200 V, respectively. High-resolution transmission electron microscopy indicated that the distance between adjacent graphene layers of carbon nanorods is much larger than that of well-graphitized MWNTs. In electron-energy-loss spectra, the energy of π+σ plasmon peak for the carbon nanorod shifts towards lower value of 23.8 eV, by comparison with the well-graphitized MWNT at 25.5 eV. In addition, the π palsmon peak at 6 eV is clearly defined for the well-graphitized MWNT, but not seen for the carbon nanorod. X-ray photoelectron spectroscopy also showed that the delocalization of π electrons gets more pronounced with the structural evolvement from the carbon nanorod to the well-graphitized MWNT. Therefore, it is suggested that ionic bombardment can provide sufficient internal energy for dehydrogenation from hydrocarbon molecules, and thus, well-graphitized MWNTs could be grown even at low temperatures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 772: Symposium M – Nanotube-Based Devices , 2003 , M1.9
Copyright
Copyright © Materials Research Society 2003

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