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Synchrotron x-ray Scattering Study on Oxidation of AIN/Sapphire

Published online by Cambridge University Press:  10 February 2011

H. C. Kang ,
S. H. Seo  and
D. Y. Noh
H. C. Kang
Affiliation:
Department of Materials Science and Engineering, Kwangju Institute of Science and Technology, Kwangju, KOREA 500-762, dynoh@kjist.ac.kr
S. H. Seo
Affiliation:
Department of Materials Science and Engineering, Kwangju Institute of Science and Technology, Kwangju, KOREA 500-762, dynoh@kjist.ac.kr
D. Y. Noh
Affiliation:
Department of Materials Science and Engineering, Kwangju Institute of Science and Technology, Kwangju, KOREA 500-762, dynoh@kjist.ac.kr
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Abstract

We present an x-ray scattering study of the oxidation of AIN/sapphire films into λ-A12O3 upon annealing. Epitaxial AIN/Sapphire(0001) transforms into nano-crystalline epitaxial λ-A12O3 during annealing at temperatures above 800°C in air. The crystalline orientational relation between the λ-Al2O3 and AIN are < 111 > // < 0001 > in the film normal direction, and < 110 > // < 1120 > in the film plane direction. The domain size of the spinel λ-A1203 crystalline is smaller than 50 Å in both out-of-plane and in-plane directions. The XPS depth profiles of the oxide film showed that the film is composed of aluminum and oxygen, and the atomic concentration ratio is about 2:3.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 590: Symposium R – Applications of Synchrotron Radiation Techniques…V , 1999 , 195
Copyright
Copyright © Materials Research Society 2000

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References

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