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Technique for Monitoring the Etching Rate of Alumina

Published online by Cambridge University Press:  15 March 2011

B. Deb ,
A. Altay ,
S. R. Gilliss ,
N.E. Munoz  and
C. B. Carter
B. Deb
Affiliation:
Department of Chemical Engineering and Material Science University of Minnesota, Minneapolis, MN 55455-0132
A. Altay
Affiliation:
Department of Chemical Engineering and Material Science University of Minnesota, Minneapolis, MN 55455-0132
S. R. Gilliss
Affiliation:
Department of Chemical Engineering and Material Science University of Minnesota, Minneapolis, MN 55455-0132
N.E. Munoz
Affiliation:
Department of Chemical Engineering and Material Science University of Minnesota, Minneapolis, MN 55455-0132
C. B. Carter
Affiliation:
Department of Chemical Engineering and Material Science University of Minnesota, Minneapolis, MN 55455-0132
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Abstract

The effect of chemical and thermal treatments on the grains and grain boundaries of polycrystalline μ-Al2O3 has been examined using a combination of microscopy techniques. Commercially available alumina samples (Lucalox™) were chemically etched in phosphoric acid at 200°C in increments of 15 min. Thermal treatments were carried out at 1650°C before chemical treatments. Using maps obtained by visible-light microscopy (VLM) as a guide, the same regions were re-examined using atomic force microscopy (AFM) after subsequent treatments. Variations in the dissolution rates of different grains and grain boundaries could then be studied using AFM. The geometry of the grain-boundary grooves was compared after thermal and chemical treatments. Electron backscattered diffraction (EBSD) patterns recorded in the scanning electron microscope (SEM) were used to obtain crystallographic orientations of the grains which enabled variations in dissolution rates between grains to be correlated to orientation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 819: Symposia N/P – Interfacial Engineering for Optimized Properties III , 2004 , N3.11
Copyright
Copyright © Materials Research Society 2004

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