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Thermal Stability of a-SiNx:H Films

Published online by Cambridge University Press:  22 February 2011

V.Kh. Kudoyargva ,
A. A. Aivazov ,
B. G. Budaguan  and
I. V. Filatova
V.Kh. Kudoyargva
Affiliation:
A.F. Ioffe Physical Technical Institute, St. Petersburg, Russia
A. A. Aivazov
Affiliation:
Moscow Institute of Electronic Technology, Zelenograg, Russia
B. G. Budaguan
Affiliation:
Moscow Institute of Electronic Technology, Zelenograg, Russia
I. V. Filatova
Affiliation:
Moscow Institute of Electronic Technology, Zelenograg, Russia
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Abstract

The investigations of thermal stability of a-SiNx:H films (x≤0.4) have xbeen performed bv both IR spectroscopy and DTA techniques. The properties of samples with x≤0.06 were attentively considered because in this case the nitrogen may be treated as an impurity in a-Si:H. It has been shown that controlled nitrogen doping (up to 0.5 Pa NH3) can be used as an effective technique for thermostabilization of a-Si:H properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 284: Symposium G – Amorphous Insulating Thin Films , 1992 , 127
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1. Shanks, H., Fang, C.J., Cordona, M., Demand, F.J. and Kalbitr, S., Phys. Stat. Sol. B 100, 43 (1980).Google Scholar
2. Osenbach, J.W., Knolle, W.R., J. Appl. Phys. 60, 1408 (1986).Google Scholar
3. Abeles, B., Persans, P.D., Stasiewski, H. S., Yang, L., and Lanford, W., J. Non-Cryst. Solids 77/78, 1085 (1985).Google Scholar
4. Lucovsky, G., Yang, J., Chao, S.S., Tayler, J.E. and Czubatyj, W., Phys. Rev. B 28, 3234 (1983).Google Scholar
5. Aivazov, A.A., Bodyagin, N.V., Petrov, S.V., Prikhodko, E.L. and Hashimov, F.R., Pisma v Zhur. Tekh. Fiz. 16, No. 10, 91 (1990).Google Scholar
6. Tsu, D.V., Lucovsky, G. and Mantini, M.J., Phys. Rev. B 33, 7069 (1986).Google Scholar
7. Pigger, N., Davis, E.A. and Bayliss, J., J. Non-Cryst. Solids 97/98, 1047 (1987).Google Scholar