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Thermochemistry and Kinetics of Gas-Phase Reactions Relevant to the CVD of Coatings: New Data for Process Models

Published online by Cambridge University Press:  10 February 2011

M. D. Allendorf ,
C. F. Melius  and
A. H. McDaniel
M. D. Allendorf
Affiliation:
Combustion Research Facility, Sandia National Laboratories, Livermore, CA 94551-0969, mdallen@sandia.gov
C. F. Melius
Affiliation:
Combustion Research Facility, Sandia National Laboratories, Livermore, CA 94551-0969, mdallen@sandia.gov
A. H. McDaniel
Affiliation:
Combustion Research Facility, Sandia National Laboratories, Livermore, CA 94551-0969, mdallen@sandia.gov
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Abstract

Understanding the role of gas-phase reactions is an important step in the development of useful CVD process models. In this article, we review the general types of gas-phase reactions that can occur and discuss quantum-chemistry techniques for predicting their thermochemistry and kinetics. We also describe the use of high-temperature flow reactors to measure gas-phase reaction kinetics. Coupling these theoretical and experimental methods is a powerful approach to the characterization of CVD precursor chemistry. We illustrate this in a discussion of the reaction between BC13 and NH3, which is important in the deposition of hexagonal boron nitride coatings.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 555: Symposium OO – Properties and Processing of Vapor-Deposited Coatings , 1998 , 121
Copyright
Copyright © Materials Research Society 1999

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