Hostname: page-component-78c5997874-t5tsf Total loading time: 0 Render date: 2024-11-19T07:28:51.823Z Has data issue: false hasContentIssue false
  • English
  • Français

Thin Film Growth using Ablation of Ceramics with a Lina-Spark™ Atomizer

Published online by Cambridge University Press:  15 February 2011

R. Hourlet ,
R. Vacassy ,
H. Hofmann  and
W. Vogel
R. Hourlet
Affiliation:
Laboratoire de Technologie des Poudres, EPFL, CH-1015 Lausanne, SwitzerlandLSA, CH-1096 Cully, Switzerland
R. Vacassy
Affiliation:
Laboratoire de Technologie des Poudres, EPFL, CH-1015 Lausanne, SwitzerlandLSA, CH-1096 Cully, Switzerland
H. Hofmann
Affiliation:
Laboratoire de Technologie des Poudres, EPFL, CH-1015 Lausanne, SwitzerlandLSA, CH-1096 Cully, Switzerland
W. Vogel
Affiliation:
Laboratoire de Technologie des Poudres, EPFL, CH-1015 Lausanne, SwitzerlandLSA, CH-1096 Cully, Switzerland, lwvogel@bluewin.ch
Get access

Abstract

A laser spark atomizer (LINA-SPARK™), LSA, has been used for preparing powder particles from SnO2, Al2O3 and ZrO2 ceramic specimen. It is shown that this technique can be used for preparing thin films by direct deposition on a substrate. The as-prepared powder can also be redispersed and deposited using ultrasonic nebulization (Pyrosol) deposition. The latter approach is especially suited for deposition of controlled-size and multicomponent thin films.

The coupling of the LSA to an induced coupled plasma (ICP) emission spectrometer is also discussed and compared with laser ablation. Generally powder particles produced from LSA present a narrower size distribution as powders prepared by laser ablation. As a result, the quantitative elemental analysis of solids are improved with full benefit of the sensitivity and detection limits of the ICP are lowered.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 526: Symposium Y – Advances in Laser Ablation of Materials , 1998 , 117
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Laser Ablation and Desorption, edited by Miller, J.C. sand Haglund, R.F. Jr., Academic Press, New York (1998)Google Scholar
[2] Dutta, J., Houriet, R., Hofmann, H., Smith, A., Proc. of 6th European Conference on Applications of Surface & Interface Analysis (ECASIA 95), edited by Mathieu, H.J., Reihl, B. and Briggs, D. Wiley, New York (1996), p. 875–878 Google Scholar
[3] Houriet, R., Feschotte, J., Dutta, J., Hofmann, H., Le Vide: Science. Technique et Applications 279, p. 230 (1996)Google Scholar