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Tribomechanical Property Modification of Commercial TiN Coatings by Carbon Ion Implantation

Published online by Cambridge University Press:  22 February 2011

L.J. Liu ,
D.K. Sood  and
R.R. Manory
L.J. Liu
Affiliation:
Microelectronics and Materials Technology Centre, Royal Melbourne Institute of Technology, 124 La Trobe Street, Melbourne 3000, Australia.
D.K. Sood
Affiliation:
Microelectronics and Materials Technology Centre, Royal Melbourne Institute of Technology, 124 La Trobe Street, Melbourne 3000, Australia.
R.R. Manory
Affiliation:
Department of Chemical and Metallurgical Engineering.
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Abstract

About 2 μm thick commercial coatings of TiN on high speed steel substrates were implanted at room temperature with 95 keV carbon to nominal doses between 1 × 1017 and 8×1017 ions cm-2. An ultra-microhardness apparatus (UMIS-2000) was used to measure hardness, and a pin-on-disc machine (CSEM Tribometer) with a sapphire ball was used to measure wear, friction and adhesion. Carbon implantation induced a significant improvement in ultra-microhardness, friction coefficient and wear properties. The surface microhardness increases monotonically by up to 115% until a critical dose φ crit is reached. Beyond this dose the hardness decreases, but remains higher than that of unimplanted sample. A lower friction coefficient and a longer transition period towards a steady state condition were obtained by implantation. An improvement of up to four times in the wear is obtained after carbon implantation. Topology studies with SEM show a change in the mode of wear. The changes in tribomechanical properties are discussed in terms of radiation damage and possible second phase formation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 316: Symposium A – Materials Synthesis and Processing Using Ion Beams , 1993 , 563
Copyright
Copyright © Materials Research Society 1994

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References

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