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X-Ray Reflectivity Measurements of Surface Roughness Using Energy Dispersive Detection

Published online by Cambridge University Press:  21 February 2011

E. Chason  and
D. T. Warwick
E. Chason
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
D. T. Warwick
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
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Abstract

We describe a new technique for measuring X-ray reflectivity using energy dispersive X-ray detection. The benefits of this method are the use of a fixed scattering angle and parallel detection of all energies simultaneously. These advantages make the technique more compatible with growth chambers and useable with laboratory X-ray sources. We find excellent agreement between the calculated Fresnel reflectivity and the reflectivity obtained from a smooth Ge (001) surface. Reflectivities obtained during 500 eV Xe ion bombardment of Ge surfaces demonstrate the sensitivity of the technique to be better than 1 Å.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 208: Symposium J – Advances in Surface and Thin Film Diffraction , 1990 , 351
Copyright
Copyright © Materials Research Society 1991

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References

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