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ZnO Thin Film Surface Acoustic Wave based Lab-on-a-Chip

Published online by Cambridge University Press:  31 January 2011

Jack Luo ,
Yongqing Richard Fu ,
Xiaoye Du ,
Daesik Lee ,
Sung Maeng ,
Andrew Flewitt  and
Bill Milne
Jack Luo
Affiliation:
J.Luo@bolton.ac.uk, University of Bolton, Centre for Material Research & Innovation, Deane Road, Bolton, BL3 5AB, United Kingdom, 0044 1204 903523
Yongqing Richard Fu
Affiliation:
R.Y.Fu@hw.ac.uk, Heriot-Watt University, School of Engineering and Physical Sciences, Edinburgh, United Kingdom
Xiaoye Du
Affiliation:
xd209@cam.ac.uk, Cambridge University, Eng. Dept., Cambridge, United Kingdom
Daesik Lee
Affiliation:
dslee@etri.re.kr, Electronics and Telecommunications Research institute, Daejeon, Korea, Republic of
Sung Maeng
Affiliation:
sunglyulm@gmail.com, Electronics and Telecommunications Research institute, Daejeon, Korea, Republic of
Andrew Flewitt
Affiliation:
ajf@eng.cam.ac.uk, Cambridge University, Eng. Dept., Cambridge, United States
Bill Milne
Affiliation:
wim1@hermes.cam.ac.uk, Cambridge University, Eng. Dept., Cambridge, United Kingdom
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Abstract

Lab-on-a-chip (LOC) is one of the most important microsystem applications with promise for use in microanalysis, drug development, diagnosis of illness and diseases etc. LOC typically consists of two main components: microfluidics and sensors. Integration of microfluidics and sensors on a single chip can greatly enhance the efficiency of biochemical reactions and the sensitivity of detection, increase the reaction/detection speed, and reduce the potential cross-contamination, fabrication time and cost etc. However, the mechanisms generally used for microfluidics and sensors are different, making the integration of the two main components complicated and increases the cost of the systems. A lab-on-a-chip system based on a single surface acoustic wave (SAW) actuation mechanism is proposed. SAW devices were fabricated on nanocrystalline ZnO thin films deposited on Si substrates using sputtering. Coupling of acoustic waves into a liquid induces acoustic streaming and motion of droplets. A streaming velocity up to ˜5cm/s and droplet pumping speeds of ˜1cm/s were obtained. It was also found that a higher order mode wave, the Sezawa wave is more effective in streaming and transportation of microdroplets. The ZnO SAW sensor has been used for prostate antigen/antibody biorecognition systems, demonstrated the feasibility of using a single actuation mechanism for lab-on-a-chip applications.

Keywords

microelectro-mechanical (MEMS)acousticfluidics
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1222: Symposium DD – Microelectromechanical Systems — Materials and Devices III , 2009 , 1222-DD01-05
Copyright
Copyright © Materials Research Society 2010

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