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Arrays of Well-Defined Size-Tunable Metallic Nano-Cones for Plasmonic Applications

Published online by Cambridge University Press:  01 February 2011

Monika Fleischer ,
Florian Stade ,
Andreas Heeren ,
Michael Haeffner ,
Dieter P. Kern ,
Kai Braun ,
Catrinel Stanciu  and
Alfred J. Meixner
Monika Fleischer
Affiliation:
monika.fleischer@uni-tuebingen.de, University of Tuebingen, Institute of Applied Physics, Auf der Morgenstelle 10, Tuebingen, 72076, Germany
Florian Stade
Affiliation:
flo-stade@gmx.net, Institute of Applied Physics, University of Tuebingen, Auf der Morgenstelle 10, 72076 Tuebingen, Germany
Andreas Heeren
Affiliation:
andreas.heeren@uni-tuebingen.de, Institute of Applied Physics, University of Tuebingen, Auf der Morgenstelle 10, 72076 Tuebingen, Germany
Michael Haeffner
Affiliation:
michael.haeffner@web.de, Institute of Applied Physics, University of Tuebingen, Auf der Morgenstelle 10, 72076 Tuebingen, Germany
Dieter P. Kern
Affiliation:
dieter.kern@uni-tuebingen.de, Institute of Applied Physics, University of Tuebingen, Auf der Morgenstelle 10, 72076 Tuebingen, Germany
Kai Braun
Affiliation:
braun.kai@web.de, Institute of Physical and Theoretical Chemistry, University of Tuebingen, Auf der Morgenstelle 8, 72076 Tuebingen, Germany
Catrinel Stanciu
Affiliation:
catrinel.stanciu@uni-tuebingen.de, Institute of Physical and Theoretical Chemistry, University of Tuebingen, Auf der Morgenstelle 8, 72076 Tuebingen, Germany
Alfred J. Meixner
Affiliation:
alfred.meixner@uni-tuebingen.de, Institute of Physical and Theoretical Chemistry, University of Tuebingen, Auf der Morgenstelle 8, 72076 Tuebingen, Germany
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Abstract

Cones composed of noble metals with dimensions of the order of 100 nm, especially gold cones, are extremely well suited for optical near-field investigations using visible light. Their plasmon resonance frequency lies within the range of visible light frequencies, and upon illumination, strong electric field enhancement can be observed in the direct vicinity of the cone tip. For this purpose, a method to fabricate well-controlled nanocones with sharp tips is required. We present a top-down process in which arrays of cones are dry-etched from a metal stack on silicon. During the ion milling step, patterned hydrogen silsesquioxane resist is used as an etch mask. The resulting cones have tunable base diameters around 150 nm and tip radii down to less than 10 nm. Their optical characteristics are investigated by means of apertureless optical near-field microscopy, in which field enhancement at the cone tip is observed.

Keywords

Aulithography (removal)optical
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1055: Symposium GG – Excitons and Plasmon Resonances in Nanostructures , 2007 , 1055-GG10-04
Copyright
Copyright © Materials Research Society 2008

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References

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