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Composition Determination of Microcrystalline Two-Phase Silicon Rich Oxides

Published online by Cambridge University Press:  21 February 2011

D.H. Bouldin ,
C.H. Lam  and
K. Rose
D.H. Bouldin
Affiliation:
IBM, 1000 River Road, Essex Junction, Vermont 05452
C.H. Lam
Affiliation:
IBM, 1000 River Road, Essex Junction, Vermont 05452
K. Rose
Affiliation:
Center for Integrated Electronics, Rensselaer Polytechnic Institute, Troy, New York 12181
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Abstract

HRTEM measurements of silicon rich oxides (SRO) show silicon microcrystals in an oxide matrix [1]. Simple, reliable characterization of this two phase material has been a problem. Ellipsometric measurement of the refractive index is a convenient method for characterizing SRO films. Film composition can be related to the refractive index by Bruggeman's effective medium approximation. In this paper we demonstrate correlation of film compositions obtained by this technique with those obtained by Auger electron spectroscopy (AES)and Rutherford back scattering (RBS). We further demonstrate regimes of LPCVD growth where simple correlation of film composition with [N2 0]/[SiH4] gas ratios is not reliable.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 164: Symposium H – Materials Issues in Microcrystalline Semiconductors , 1989 , 33
Copyright
Copyright © Materials Research Society 1990

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