Article contents
Electrical and Optical Properties of Low Dielectric Constant Planarization Polymer for High-Aperture-Ratio a-Si:H TFT-LCDs
Published online by Cambridge University Press: 10 February 2011
Abstract
We have evaluated the electrical and the optical properties of a planarization polymer (benzocyclobutene; BCB) having a dielectric constant of 2.65 for the application to high aperture-ratio a-Si:H TFT-LCDs. An average optical transmittance of 96 % was found for the BCB film having a thickness of 3 μm in the visible-light region (400–700 nm) of the absorption spectrum. Experimental results showed that the back-channel etched a-Si:H TFT electrical performance was not significantly affected by the BCB passivation. In addition, the three-dimensional analysis of the coupling capacitances between ITO pixel electrode and metal bus lines have indicated that the low dielectric constant of planarization polymer is necessary for the application of this material to the high-aperture-ratio a-Si:H TFT-LCDs. Finally, we have established that for a given tolerance margin, a certain value of polymer thickness is needed to suppress the feed-through voltage and the vertical cross-talk between pixel electrode and metal bus lines.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1997
References
REFERENCES
- 4
- Cited by