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Growth of Single Crystal Tungsten Nanorods by Oblique Angle Sputter Deposition

Published online by Cambridge University Press:  01 February 2011

Tansel Karabacak ,
Pei-I Wang ,
Gwo-Ching Wang  and
Toh-Ming Lu
Tansel Karabacak
Affiliation:
Department of Physics, Applied Physics, and Astronomy Rensselaer Polytechnic Institute Troy, NY 12180–3590
Pei-I Wang
Affiliation:
Department of Physics, Applied Physics, and Astronomy Rensselaer Polytechnic Institute Troy, NY 12180–3590
Gwo-Ching Wang
Affiliation:
Department of Physics, Applied Physics, and Astronomy Rensselaer Polytechnic Institute Troy, NY 12180–3590
Toh-Ming Lu
Affiliation:
Department of Physics, Applied Physics, and Astronomy Rensselaer Polytechnic Institute Troy, NY 12180–3590
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Abstract

We report the creation of single crystal tungsten nanorods with unusual simple cubic β-phase. These novel nano-structures were grown by oblique angle sputter deposition with substrate rotation through a shadowing effect. Transmission electron microscopy (TEM) diffraction patterns from individual nanorods clearly show the single crystal structure. It is evident from TEM diffraction measurements, during the oblique angle deposition, both β-phase W(100) and α-phase W(110) islands exist at the initial stages of growth. However, at later stages of the growth the β-phase structure dominates. This is in contrast to the sputter deposition at normal incidence where only the thermodynamically stable bcc α-phase W(110) polycrystalline films were formed when the film grew to a certain thickness. We explain our results by using the shadowing and adatom mobility mechanisms: At the initial stages of growth, the β-phase W(100) islands grow taller due to the lower adatom mobility on these islands. The taller β-phase W(100) islands survive in the competition during oblique angle growth and form isolated nanorods in the later stages, while the shorter α-phase W(110) islands stop growing due to the shadowing effect. In addition, our Monte Carlo simulation results agree well with the experimental measurements.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 788: Symposium L – Continuous Nanophase and Nanostructured Materials , 2003 , L12.8
Copyright
Copyright © Materials Research Society 2004

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References

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