Hostname: page-component-78c5997874-j824f Total loading time: 0 Render date: 2024-11-19T11:45:12.105Z Has data issue: false hasContentIssue false
  • English
  • Français

MEMS Energy Harvesting from Low-frequency and Low-g Vibrations

Published online by Cambridge University Press:  30 June 2015

Ruize Xu  and
Sang-Gook Kim
Ruize Xu
Affiliation:
Mechanical Engineering Department, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
Sang-Gook Kim
Affiliation:
Mechanical Engineering Department, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
Get access

Abstract

MEMS vibration energy harvesting has been investigated to provide energy to low-power micro-electronic systems and potentially to enable batteryless autonomous systems. While enjoying the small footprint hence the ability to be embedded in other systems, MEMS vibration energy harvesters are working at much higher frequencies and input vibration amplitudes. The mechanical resonator based energy harvesters seem inherently have such high frequency due to the scaling of the device dimension. Lower the working frequency range and input vibration amplitude are possible by optimizing the dimensions of the device. However, we are viewing the problem from a different perspective and proposing a solution based on employing the common material property of the micro-fabricated thin film – residual stress. We found that by taking advantage of the compressive residual stress, a bi-stable mechanical resonator could be built and a new spectrum of dynamics can be brought into energy harvesting, which could lower the working frequency range and input g value. The concepts have been analytically simulated and experimentally verified by a meso-scale model.

Keywords

piezoelectricstructuralthin film
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1782: Symposium P – Nanogenerators and Piezotronics , 2015 , pp. 9 - 14
Copyright
Copyright © Materials Research Society 2015 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Jeon, Y. B., Sood, R., Jeong, J., and Kim, S., “MEMS power generator with transverse mode thin film PZT,” Sensors Actuators A Phys., vol. 122, no. 1, pp. 16–22, Jul. 2005.CrossRefGoogle Scholar
Roundy, S., Wright, P. K., and Rabaey, J., “A study of low level vibrations as a power source for wireless sensor nodes,” Comput. Commun., vol. 26, no. 11, pp. 1131–1144, Jul. 2003.CrossRefGoogle Scholar
Dutoit, N., Wardle, B., and Kim, S.-G., “Design Considerations for Mems-Scale Piezoelectric Mechanical Vibration Energy Harvesters,” Integr. Ferroelectr., vol. 71, no. 1, pp. 121–160, Jul. 2005.CrossRefGoogle Scholar
Hajati, A. and Kim, S.-G., “Ultra-wide bandwidth piezoelectric energy harvesting,” Appl. Phys. Lett., vol. 99, no. 8, p. 083105, 2011.CrossRefGoogle Scholar
Strogats, S. H., Nonlinear Dynamics and Chaos: with Applications to Physics, Biology, Chemistry, and Engineering. Perseus Books Publishing, 1994.Google Scholar
Rossi, C. and Scheid, E., “Residual stress in low pressure chemical vapor deposition SiN x films deposited from silane and ammonia,” no. April 1998, pp. 2003–2007, 2003.Google Scholar