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Micromachining for Terahertz Artificial Materials

Published online by Cambridge University Press:  01 February 2011

Andrew Gallant ,
G. Peter Swift ,
De Chang Dai ,
Mikhail Kaliteevski ,
Dagou A Zeze ,
David Wood ,
Michael C Petty ,
Stuart Brand ,
Richard A. Abram  and
J. Martyn Chamberlain
Andrew Gallant
Affiliation:
a.j.gallant@durham.ac.uk, Durham University, School of Engineering, Science Laboratories, Durham University, South Road., Durham, DH1 3LE, United Kingdom
G. Peter Swift
Affiliation:
G.P.Swift@durham.ac.uk, Durham University, Physics Department, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
De Chang Dai
Affiliation:
dechang.dai@durham.ac.uk, Durham University, Physics Department, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
Mikhail Kaliteevski
Affiliation:
mikhail.kaliteevski@durham.ac.uk, Durham University, Physics Department, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
Dagou A Zeze
Affiliation:
d.a.zeze@durham.ac.uk, Durham University, School of Engineering, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
David Wood
Affiliation:
david.wood@durham.ac.uk, Durham University, School of Engineering, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
Michael C Petty
Affiliation:
m.c.petty@durham.ac.uk, Durham University, School of Engineering, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
Stuart Brand
Affiliation:
stuart.brand@durham.ac.uk, Durham University, Physics Department, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
Richard A. Abram
Affiliation:
r.a.abram@durham.ac.uk, Durham University, Physics Department, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
J. Martyn Chamberlain
Affiliation:
martyn.chamberlain@durham.ac.uk, Durham University, Physics Department, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
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Abstract

In this paper we report on the development of micromachined filters for operation at terahertz frequencies. SU8, a negative photodefinable epoxy, is used to define arrays of high aspect ratio rods which are subsequently sputter coated in gold to form the filter. We fabricate and test a filter with a fixed period but variable diameter along the length of the array. By moving the array in the terahertz beam we demonstrate the ability to mechanically tune specific filter characteristics from a single device.

Keywords

microelectro-mechanical (MEMS)microstructureoptical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1016: Symposium CC – Materials and Material Structures Enabling Terahertz Technology , 2007 , 1016-CC05-07
Copyright
Copyright © Materials Research Society 2007

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References

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