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Self-interstitials have never been observed in crystalline Si. How about amorphous Si?

Published online by Cambridge University Press:  17 March 2011

Sjoerd Roorda*
Affiliation:
Département de physique et Groupe de recherche en physique et technologie des couches mines, Université de Montréal CP 6128 succursale Centre-ville Montréal, H3C 3J7, CANADA
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Abstract

In the early days of point defect studies in electron irradiated crystalline silicon, it was surmised that the Si self-interstitial is highly mobile even at 4 K and escapes direct detection. The existence of self-interstitials has of course been confirmed through the diffusion behaviour of a range of impurities and the direct observation of larger interstitial-type clusters. Against this background, the direct observation of self-interstitials in amorphous Si would seem next to impossible. Yet just such an observation may have been made recently, through a comparison of the high-resolution radial distribution function of pure amorphous Si before and after thermal anneal and that of crystalline Si.

Type
Research Article
Copyright
Copyright © Materials Research Society 1999

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References

REFERENCES

[1] Roorda, S., Sinke, W. C., Poate, J. M., Jacobson, D. C., Dierker, S., Denis, B. S, Eaglesham, D. J., Spaepen, F., and Fuoss, P., Phys. Rev. B 44, 3702 (1991).Google Scholar
[2] Coffa, S., Poate, J.M., Jacobson, D.C., and Polman, A., Appl. Phys. Lett. 58, 2916 (1991).Google Scholar
[3] Roorda, S., Hakvoort, R.A., Veen, A. van, Stolk, P.A., and Saris, F.W., J. Appl. Phys. 72, 5145 (1992).Google Scholar
[4] Laaziri, K., Kycia, S., Roorda, S., Chicoine, M., Robertson, J.L., Wang, J., and Moss, S.C., Phys. Rev. Lett. 82, 3460 (1999).Google Scholar
[5] Laaziri, K., Kycia, S., Roorda, S., Chicoine, M., Robertson, J.L., Wang, J., and Moss, S.C., Phys. Rev. B 60, 13520 (1999).Google Scholar
[6] Roorda, S., Laaziri, K., and Gujrathi, S.C., Nucl. Instr. and Meth. B 148, 360 (1999).Google Scholar
[7] Custer, J. S., Thomson, M. O., Jacobson, D. C., Poate, J. M., Roorda, S., Sinke, W. C. and Spaepen, F., Appl. Phys. Lett. 64, 437 (1994).Google Scholar
[8] Williamson, D. L., Roorda, S., Chicoine, M., Tabti, R., Stock, P. A., Acco, S. and Saris, F. W., Appl. Phys. Lett. 67, 226 (1995).Google Scholar
[9] Volkert, C. A., J. Appl. Phys. 74, 7107 (1993).Google Scholar