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Stoichiometric Effects of Sputtered Barium Strontium Titanate Films

Published online by Cambridge University Press:  10 February 2011

B. A. Baumert ,
T.-L. Tsai ,
L.-H. Chang ,
T. P. Remmel ,
M. L. Kottke ,
P. L. Fejes ,
W. Chen ,
E. P. Ehlert ,
D. F. Sullivan  and
C. J. Tracy
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B. A. Baumert
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
T.-L. Tsai
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
L.-H. Chang
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
T. P. Remmel
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
M. L. Kottke
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
P. L. Fejes
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
W. Chen
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
E. P. Ehlert
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
D. F. Sullivan
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
C. J. Tracy
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
B. M. Melnick
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
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Abstract

Barium Strontium Titanate films have been deposited by rf magnetron sputtering and have been studied with respect to Ba/Sr ratio. Physical and electrical characterization has been done as a function of temperature, thickness, and composition, and results show that dielectric constant increases with increasing temperature, thickness (up to ∼80 nm), and Ba/Sr ratio for the compositions studied. The lattice parameters for the sputtered films are larger than those expected for powder samples and also increase with increasing Ba/Sr ratio.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997 , 21
Copyright
Copyright © Materials Research Society 1998

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References

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