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Surface Erosion of TiO2 subjected to Energetic Oxygen Bombardment

Published online by Cambridge University Press:  04 February 2011

Roger Smith  and
Wolfhard Möller
Roger Smith
Affiliation:
Loughborough University, Ashby Road, Loughborough, LE11 3TU, UK. FZD Rossendorf, Bautzner Landsraße 400, 01328 Dresden, Germany.
Wolfhard Möller
Affiliation:
FZD Rossendorf, Bautzner Landsraße 400, 01328 Dresden, Germany.
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Abstract

The effect of energetic oxygen bombardment of the TiO2 rutile {110} surface is studied by means of molecular dynamics simulations using a variable charge potential. A random selection of O atoms and O2 molecules are incident successively and normally onto the surface. At an energy of 5 eV the surface becomes saturated with oxygen until covered with between 1 and 2 monolayers of adatoms. As the fluence further increases Ti atoms are pulled out from the bulk and become surrounded by the O atoms forming well-defined atomic clusters on the surface which then desorb. At bombardment energies of 400 eV, the O atoms penetrate into the bulk and voids form whose surfaces are decorated with oxygen atoms. As the O fluence further increases the surface is sputtered and the voids then intersect the surface forming a very rough topography.

Keywords

oxidationplasma depositionTi
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1298: Symposium Q/R/T – Advanced Materials for Applications in Extreme Environments , 2011 , mrsf10-1298-r08-01
Copyright
Copyright © Materials Research Society 2011

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References

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