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Synthesis and control of micro to noanscale porous structures of diamond like carbon films

Published online by Cambridge University Press:  01 February 2011

Peter Feng ,
Ben Yang ,
H. X. Zhang ,
X. P. Wang ,
Noel Upia ,
G. Morella  and
B.R. Weinerd
Peter Feng
Affiliation:
pfeng@cnnet.upr.edu, University of Puerto Rico, Physics Department, Ave. Ponce de leon, PO Box 23343, San Juan, 00931, Puerto Rico, 7877640000ext2719, 7877644063
Ben Yang
Affiliation:
yangsiom@yahoo.com, University of Puerto Rico, Physics Department, Ave. Ponce de leon,, PO Box 23343, San Juan, 00931, Puerto Rico
H. X. Zhang
Affiliation:
zhanghongxin727@yahoo.com, University of Puerto Rico, Physics Department, Ave. Ponce de leon, PO Box 23343,, San Juan, 00931, Puerto Rico
X. P. Wang
Affiliation:
david011608@hotmail.com, University of Puerto Rico, Physics Department, Ave. Ponce de leon, PO Box 23343,, San Juan, 00931, Puerto Rico
Noel Upia
Affiliation:
noelupia@gmail.com, University of Puerto Rico, Physics Department, Ave. Ponce de leon, PO Box 23343,, San Juan, 00931, Puerto Rico
G. Morella
Affiliation:
gerardo@adam.uprr.pr, University of Puerto Rico, Physics Department, Ave. Ponce de leon, PO Box 23343,, San Juan, 00931, Puerto Rico
B.R. Weinerd
Affiliation:
brad@hpcf.upr.edu, University of Puerto Rico, Chemistry Department, Ave. Ponce de leon, P.O. Box 23346, San Juan, 00931, Puerto Rico
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Abstract

Diamond like carbon (DLC) films are synthesized on various substrates using a pulsed KrF excimer laser ablation deposition technique. Variations of laser power density, substrate temperature, angle and distance between the substrate and target yield different sizes of porous surfaces of DLC films. Microscope is used to examine the surfaces. Raman scattering is used to characterize the samples, and the typical G and D bands have been identified. Intensities and profiles of the G and D bands closely depend on laser power density. The relationship between the deposition rate and the power density is also studied.

Keywords

plasma depositionporosityfilm
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 954: Symposium H – Biofilm-Material Interactions — New Tools, Technologies and Opportunities , 2006 , 0954-H05-11
Copyright
Copyright © Materials Research Society 2007

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References

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