Hostname: page-component-78c5997874-8bhkd Total loading time: 0 Render date: 2024-11-04T14:39:30.785Z Has data issue: false hasContentIssue false
  • English
  • Français

Crystal orientation measurements using SEM–EBSD under unconventional conditions

Published online by Cambridge University Press:  12 May 2015

Karsten Kunze
Karsten Kunze*
Affiliation:
ETH Zurich, Scientific Center for Optical and Electron Microscopy (ScopeM), Zurich, Switzerland
*
a) Author to whom correspondence should be addressed. Electronic mail: karsten.kunze@scopem.ethz.ch
Get access Rights & Permissions [Opens in a new window]

Abstract

Electron backscatter diffraction (EBSD) is a micro-analytical technique typically attached to a scanning electron microscope (SEM). The vast majority of EBSD measurements is applied to planar and polished surfaces of polycrystalline bulk specimen. In this paper, we present examples of using EBSD and energy-dispersive X-ray spectroscopy (EDX) to analyze specimens that are not flat, not planar, or not bulk – but pillars, needles, and rods. The benefits of low vacuum SEM operation to reduced drift problems are displayed. It is further demonstrated that small and thin specimens enhance the attainable spatial resolution for orientation mapping (by EBSD or transmission Kikuchi diffraction) as well as for element mapping (by EDX).

Keywords

electron backscatter diffractiontransmission Kikuchi diffractionenergy dispersive X-ray spectroscopylow vacuum mode
Type
Technical Articles
Information
Powder Diffraction , Volume 30 , Issue 2 , June 2015 , pp. 104 - 108
Check for updates
Copyright
Copyright © International Centre for Diffraction Data 2015 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Adams, B. L., Wright, S. I., and Kunze, K. (1993). “Orientation imaging – the emergence of a new microscopy,” Metall. Trans. A – Phys. Metall. Mater. Sci. 24(4), 819–831.Google Scholar
Buzzi, S. (2009). Dissertation Eidgenössische Technische Hochschule ETH Zürich, http://dx.doi.org/10.3929/ethz-a-005813582.Google Scholar
Camus, P. P., Shapiro, J., and Prikhodko, S. V. (2011). “An EBSD study of gallium arsenide nanopillars,” Mater. Sci. Forum 702–703, 916–919.CrossRefGoogle Scholar
Drouin, D., Couture, A. R., Joly, D., Tastet, X., Aimez, V., and Gauvin, R. (2007). “CASINO V2.42 – a fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users,” Scanning 29(3), 92–101.CrossRefGoogle ScholarPubMed
Keller, R. R. and Geiss, R. H. (2012). “Transmission EBSD from 10 nm domains in a scanning electron microscope,” J. Microsc. 245(3), 245–251.CrossRefGoogle Scholar
Kunze, K., Buzzi, S., Löffler, J., and Burg, J.-P. (2008). “Benefits of Low Vacuum SEM for EBSD Applications,” In EMC 2008, Aachen, Vol. 1: Instrumentation and Methods, Luysberg, M., Tillmann, K., Weirich, T., eds., pp. 575–576, DOI: 10.1007/978-3-540-85156-1_288.CrossRefGoogle Scholar
Kunze, K., Sologubenko, A., Ma, H., and Spolenak, R. (2013). “Orientation contrast imaging and crystallographic orientation mapping using transmission Kikuchi diffraction in the SEM,” In Proceedings Microscopy Congress 2013, Rachel, R., ed., Augsburg, pp. 744–745, urn:nbn:de:bvb:355-epub-287343.Google Scholar
Payton, E. J. and Nolze, G. (2013). “The backscatter electron signal as an additional tool for phase segmentation in electron backscatter diffraction,” Microsc. Microanal. 19(4), 929–941.CrossRefGoogle ScholarPubMed
Trimby, P. W. (2012). “Orientation mapping of nanostructured materials using transmission Kikuchi diffraction in the scanning electron microscope,” Ultramicroscopy 120, 16–24.CrossRefGoogle ScholarPubMed
Zaefferer, S. (2007). “On the formation mechanisms, spatial resolution and intensity of backscatter Kikuchi patterns,” Ultramicroscopy 107(2–3), 254–266.Google Scholar