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Crystal orientation measurements using SEM–EBSD under unconventional conditions

Published online by Cambridge University Press:  12 May 2015

Karsten Kunze
Karsten Kunze*
Affiliation:
ETH Zurich, Scientific Center for Optical and Electron Microscopy (ScopeM), Zurich, Switzerland
*
a) Author to whom correspondence should be addressed. Electronic mail: karsten.kunze@scopem.ethz.ch
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Abstract

Electron backscatter diffraction (EBSD) is a micro-analytical technique typically attached to a scanning electron microscope (SEM). The vast majority of EBSD measurements is applied to planar and polished surfaces of polycrystalline bulk specimen. In this paper, we present examples of using EBSD and energy-dispersive X-ray spectroscopy (EDX) to analyze specimens that are not flat, not planar, or not bulk – but pillars, needles, and rods. The benefits of low vacuum SEM operation to reduced drift problems are displayed. It is further demonstrated that small and thin specimens enhance the attainable spatial resolution for orientation mapping (by EBSD or transmission Kikuchi diffraction) as well as for element mapping (by EDX).

Keywords

electron backscatter diffractiontransmission Kikuchi diffractionenergy dispersive X-ray spectroscopylow vacuum mode
Type
Technical Articles
Information
Powder Diffraction , Volume 30 , Issue 2 , June 2015 , pp. 104 - 108
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Copyright
Copyright © International Centre for Diffraction Data 2015 

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