Hostname: page-component-78c5997874-8bhkd Total loading time: 0 Render date: 2024-11-19T09:33:19.175Z Has data issue: false hasContentIssue false
  • English
  • Français

Characterization of microroughness parameters in Cu-C nanocomposite prepared by co-deposition of RF-sputtering and RF-PECVD

Published online by Cambridge University Press:  03 October 2013

Shahram Solaymani ,
Seyed Mohammad Elahi ,
Negin Beryani Nezafat ,
Hadi Zahrabi ,
Arash Boochani  and
Mosayeb Naseri
Shahram Solaymani*
Affiliation:
Department of Physics, Kermanshah Branch, Islamic Azad University, Kermanshah, Iran
Seyed Mohammad Elahi
Affiliation:
Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran
Negin Beryani Nezafat
Affiliation:
Young Researchers and Elite Club, Kermanshah Branch, Islamic Azad University, Kermanshah, Iran
Hadi Zahrabi
Affiliation:
Young Researchers and Elite Club, Kermanshah Branch, Islamic Azad University, Kermanshah, Iran
Arash Boochani
Affiliation:
Department of Physics, Kermanshah Branch, Islamic Azad University, Kermanshah, Iran
Mosayeb Naseri
Affiliation:
Department of Physics, Kermanshah Branch, Islamic Azad University, Kermanshah, Iran
*
a e-mail: shahram22s2000@yahoo.com
Get access

Abstract

The morphological parameter of a thin film surface can be characterized by power spectral density (PSD) function which provides a better description on topography rather than the root mean square (RMS) and super structure contributions. Through the present study, nanoparticle copper-carbon composite films were prepared by co-deposition of RF-sputtering and RF-PECVD method using acetylene gas and copper target. These films’ surface roughnesses were determined by using an atomic force microscope (AFM). The carbon content of the films was obtained by Rutherford back scattering (RBS) which was varied from 5% to 73%. The power values of PSD for the AFM data were determined by the fast Fourier transform (FFT) algorithms. The effect of carbon on the surface roughness of thin films was investigated. Changes in the relationship between the resistivity and fractal dimension were observed for investigating films.

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 64 , Issue 1 , October 2013 , 11301
Copyright
© EDP Sciences, 2013

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Jiang, T., Hall, N., Ho, A., Morin, S., Thin Solid Films 471, 76 (2005)CrossRef
Wang, Y., Xu, K.-W., Appl. Surf. Sci. 256, 2915 (2010)
Gewirth, A.A., Niece, B.K., Chem. Rev. 97, 1129 (1997)CrossRef
Kolb, D.M., Electrochim. Acta 45, 2387 (2000)CrossRef
Magnussen, O.M., Möller, F.A., Lachenwitzer, A., Behm, R.J., MRS Proceedings 451, 43 (1997)
Binnig, G., Quate, C.F., Gerber, C., Phys. Rev. Lett. 56, 930 (1986)CrossRef
Mandelbrot, B.B., The Fractal Geometry of Nature (W.H. Freemen Press, San Francisco, 1982)Google Scholar
Russ, J., Fractal Surfaces (Plenum Press, New York and London, 1994)CrossRefGoogle Scholar
Bennett, J.M., Mattson, L., Introduction to Surface Roughness and Scattering (Optical Society of America, Washington, DC, 1989)Google ScholarPubMed
Sahoo, N.K., Thakur, S., Tokas, R.B., Thin Solid Films 503, 85 (2006)CrossRef
Elson, J.M., Bennett, J.M., Appl. Opt. 34, 201 (1995)CrossRef
Itoh, T., Yamauchi, N., Appl. Surf. Sci. (2007) 253, 6196CrossRef
Solaymani, S., Ghaderi, A., Nezafat, N.B., J. Fusion. Energ. 31, 591 (2012)CrossRef
Tayfun, B., Kayhan, D., Fractal 9, 105 (2001)
Ghodselahi, T., Solaymani, S., Pasha, M.A., Vesaghi, M.A., Eur. Phys. J. D 66, 299 (2012)CrossRef
Ghodselahi, T., Vesaghi, M.A., Shafiekhani, A., Baradaran, A., Karimi, A., Mobini, Z., Surf. Coat. Technol. 202, 2731 (2008)CrossRef
Mayer, M., SIMNRA User’s Guide, Report IPP 9/113 (Max-Planck-Institut fur plasmaphysik, Garching, Germany, 1997)Google Scholar
Senthilkumar, M., Sahoo, N.K., Thakur, S., Tokas, R.B., Appl. Surf. Sci. 252, 1608 (2005)CrossRef
Singh, J.P., Singh, R., Mishra, N.C., Kanjilal, D., Ganesan, V., J. Appl. Phys. 90, 5968 (2001)CrossRef
Castleman, K.R., Digital Image Processing (Prentice Hall, New Jersey, 1996), p. 207Google Scholar
Ghodselahi, T., Vesaghi, M.A., Shafiekhani, A., Ahmadi, M., Panahandeh, M., Saani, M.H., Physica B 405, 3949 (2010)CrossRef