Hostname: page-component-78c5997874-fbnjt Total loading time: 0 Render date: 2024-11-19T10:48:22.180Z Has data issue: false hasContentIssue false

Vibrational analysis of single-layered piezoelectric AFM microcantilever in amplitude mode by considering the capillary force

Published online by Cambridge University Press:  05 December 2014

Alireza Habibnejad Korayem
Affiliation:
Robotic Research Laboratory, Center of Excellence in Experimental Solid Mechanics and Dynamics, School of Mechanical Engineering, Iran University of Science and Technology, Tehran, Iran
Moharam Habibnejad Korayem*
Affiliation:
Robotic Research Laboratory, Center of Excellence in Experimental Solid Mechanics and Dynamics, School of Mechanical Engineering, Iran University of Science and Technology, Tehran, Iran
Reza Ghaderi
Affiliation:
Robotic Research Laboratory, Center of Excellence in Experimental Solid Mechanics and Dynamics, School of Mechanical Engineering, Iran University of Science and Technology, Tehran, Iran
Get access

Abstract

In this article, the vibrational behavior of a microcantilever (MC) with an extended piezoelectric layer in the air ambient undergoes examination. To model the vibrational motion of this type of cantilever, the Hamilton’s principle has been used. For this purpose, the MC vibrational equation has been derived by the assumption of the continuous beam based on the Euler-Bernoulli beam theory. By adopting the finite element method (FEM), the MC differential equation has been solved. In the present simulation not only van der Waals and contact forces but also the capillary forces resulting from the condensation of the water vapors in air on MC tip have been considered. The results illustrate that the force between the sample surface and the probe affects the MC amplitude; furthermore, it causes the reduction in the resonance frequency. In addition, to reduce the time delay during topography from the surface roughness, it is better to select MCs with larger width and length and smaller thickness. Furthermore, the results indicate that the best imaging takes place when the vibration is in its second vibrational mode. Finally, the effects of MC geometric parameters on the time delay between the starting moment of surface roughness and the moment of variation in the MC amplitude (surface roughness topography) have been analyzed.

Type
Research Article
Copyright
© EDP Sciences, 2014

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Jalili, N., Laxminarayana, K., Mechatronics 14, 907 (2004)CrossRef
Minne, S.C., Manalis, S.R., Quate, C.F., Appl. Phys. Lett. 67, 3918 (1995)CrossRef
Liu, M., Tong, J., Wang, L., Cui, T., Microsys. Technol. 12, 335 (2006)CrossRef
Fung, R.F., Huang, S.C., J. Vib. Acoust. 10, 502 (2001)CrossRef
Mahmoodi, S.N., Jalili, N., Ahmadian, M., J. Vib. Acoust. 69, 673 (2009)
Shibataa, T., Unno, K., Makino, E., Ito, Y., Shimadad, S., Sens. Actuators 102, 106 (2002)CrossRef
Shibata, T., Unno, K., Makinoc, E., Shimada, S., Sens. Actuators 114, 398 (2004)CrossRef
Mahmoodi, S.N., Jalili, N., Int. J. Non-Linear Mech. 42, 577 (2007)CrossRef
Bashash, S., Salehi-Khojin, A., Jalili, N., Lee Thompson, G., Vertegel, A., Müller, M., Berger, R., J. Micromech. Microeng. 19, 145 (2009)CrossRef
Wolf, K., Gottlieb, O., J. Appl. Phys. 19, 4701 (2002)CrossRef
Lazarus, A., Thomas, O., Deü, J.-F., Finite Elem. Anal. Des. 49, 35 (2012)CrossRef
Zhang, W., Meng, G., Li, H., Int. J. Adv. Manuf. Technol. 28, 321 (2006)CrossRef
Mahmoodi, S.N., Afshari, M., Jalili, N., Journal of Nonlinear Science and Numerical Simulation 13, 1964 (2008)CrossRef
Salehi-Khojin, A., Bashash, S., Jalili, N., J. Micromech. Microeng. 18, 267 (2008)CrossRef
Itoh, T., Suga, T., Sens. Actuators 43, 305 (1994)CrossRef
Itoh, T., Suga, T., Sens. Actuators 54, 477 (1996)CrossRef
Basso, M., Giarre, L., Dahleh, M., Mezic, I., Journal of ASME 122, 240 (2000)
Nayfeh, A., Nayfeh, J.F., Mook, D.T., Nonlinear Dyn. 3, 145 (1992)CrossRef
Korayem, M.H., Ghaderi, R., Scientia Iranica B 20, 195 (2013)
Malli, A., Hurth, C., Boisgard, R., Jai, C., Cohen-Bouhacina, T., Aime, J.P., J. Appl. Phys. 97, 749 (2005)
Zitzler, L., Herminghaus, S., Mugele, F., Phys. Rev. B 66, 155436 (2002)CrossRef