Hostname: page-component-78c5997874-lj6df Total loading time: 0 Render date: 2024-11-19T12:43:15.196Z Has data issue: false hasContentIssue false

A special study on the sensitivity of electron mobility with respect to the tunnel oxide thickness for a floating gate electron-tunneling mosfet

Published online by Cambridge University Press:  15 January 1999

M. A. Grado-Caffaro
Affiliation:
C/Julio Palacios, 11, 9B, 28029 Madrid, Spain
M. Grado-Caffaro
Affiliation:
C/Julio Palacios, 11, 9B, 28029 Madrid, Spain
Get access

Abstract

A sensitivity factor for electron mobility with respect to the tunnel oxide thicknessin a floating gate electron-tunneling MOSFET of n-channel is defined. To this end, afield-dependent mobility is assumed.

Keywords

Type
Rapid Communication
Copyright
© EDP Sciences, 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

N. Ajika, M. Ohi, H. Arima, T. Matsukawa, N. Tsubouchi, IEDM Tech. Dig., 115 (1990).
S.M. Sze, Physics of semiconductor devices (Wiley, 1969).
J.W. Ku, S.C. Chao, Semicond. Int., 108 (May 1997).
Grado-Caffaro, M.A., Grado-Caffaro, M., Act. Pass. Electronic Comp. 20, 165 (1998). CrossRef
K.V. Shal /'imova, Physics of semiconductors (Mir, Moscow, 1975) p. 166.
P.M. Lee, in Problems in solid state physics, edited by H.J. Goldsmid (Pion Limited, London, 1975) p. 402.
A.S. Grove, Physics and technology of semiconductor devices (John Wiley and Sons, 1967) p. 346.