Book contents
- Frontmatter
- Contents
- Preface to the second English edition
- Preface to the first edition
- Introduction
- 1 Abbe's sine condition
- 2 Fourier optics
- 3 Effect of polarization on diffraction in systems of high numerical aperture
- 4 Gaussian beam optics
- 5 Coherent and incoherent imaging
- 6 First-order temporal coherence in classical optics
- 7 The van Cittert–Zernike theorem
- 8 Partial polarization, Stokes parameters, and the Poincaré sphere
- 9 Second-order coherence and the Hanbury Brown–Twiss experiment
- 10 What in the world are surface plasmons?
- 11 Surface plasmon polaritons on metallic surfaces
- 12 The Faraday effect
- 13 The magneto-optical Kerr effect
- 14 The Sagnac interferometer
- 15 Fabry–Pérot etalons in polarized light
- 16 The Ewald–Oseen extinction theorem
- 17 Reciprocity in classical linear optics
- 18 Optical pulse compression
- 19 The uncertainty principle in classical optics
- 20 Omni-directional dielectric mirrors
- 21 Linear optical vortices
- 22 Geometric-optical rays, Poynting's vector, and the field momenta
- 23 Doppler shift, stellar aberration, and convection of light by moving media
- 24 Diffraction gratings
- 25 Diffractive optical elements
- 26 The Talbot effect
- 27 Some quirks of total internal reflection
- 28 Evanescent coupling
- 29 Internal and external conical refraction
- 30 Transmission of light through small elliptical apertures
- 31 The method of Fox and Li
- 32 The beam propagation method
- 33 Launching light into a fiber
- 34 The optics of semiconductor diode lasers
- 35 Michelson's stellar interferometer
- 36 Bracewell's interferometric telescope
- 37 Scanning optical microscopy
- 38 Zernike's method of phase contrast
- 39 Polarization microscopy
- 40 Nomarski's differential interference contrast microscope
- 41 The van Leeuwenhoek microscope
- 42 Projection photolithography
- 43 Interaction of light with subwavelength structures
- 44 The Ronchi test
- 45 The Shack–Hartmann wavefront sensor
- 46 Ellipsometry
- 47 Holography and holographic interferometry
- 48 Self-focusing in nonlinear optical media
- 49 Spatial optical solitons
- 50 Laser heating of multilayer stacks
- Index
- References
46 - Ellipsometry
Published online by Cambridge University Press: 31 January 2011
- Frontmatter
- Contents
- Preface to the second English edition
- Preface to the first edition
- Introduction
- 1 Abbe's sine condition
- 2 Fourier optics
- 3 Effect of polarization on diffraction in systems of high numerical aperture
- 4 Gaussian beam optics
- 5 Coherent and incoherent imaging
- 6 First-order temporal coherence in classical optics
- 7 The van Cittert–Zernike theorem
- 8 Partial polarization, Stokes parameters, and the Poincaré sphere
- 9 Second-order coherence and the Hanbury Brown–Twiss experiment
- 10 What in the world are surface plasmons?
- 11 Surface plasmon polaritons on metallic surfaces
- 12 The Faraday effect
- 13 The magneto-optical Kerr effect
- 14 The Sagnac interferometer
- 15 Fabry–Pérot etalons in polarized light
- 16 The Ewald–Oseen extinction theorem
- 17 Reciprocity in classical linear optics
- 18 Optical pulse compression
- 19 The uncertainty principle in classical optics
- 20 Omni-directional dielectric mirrors
- 21 Linear optical vortices
- 22 Geometric-optical rays, Poynting's vector, and the field momenta
- 23 Doppler shift, stellar aberration, and convection of light by moving media
- 24 Diffraction gratings
- 25 Diffractive optical elements
- 26 The Talbot effect
- 27 Some quirks of total internal reflection
- 28 Evanescent coupling
- 29 Internal and external conical refraction
- 30 Transmission of light through small elliptical apertures
- 31 The method of Fox and Li
- 32 The beam propagation method
- 33 Launching light into a fiber
- 34 The optics of semiconductor diode lasers
- 35 Michelson's stellar interferometer
- 36 Bracewell's interferometric telescope
- 37 Scanning optical microscopy
- 38 Zernike's method of phase contrast
- 39 Polarization microscopy
- 40 Nomarski's differential interference contrast microscope
- 41 The van Leeuwenhoek microscope
- 42 Projection photolithography
- 43 Interaction of light with subwavelength structures
- 44 The Ronchi test
- 45 The Shack–Hartmann wavefront sensor
- 46 Ellipsometry
- 47 Holography and holographic interferometry
- 48 Self-focusing in nonlinear optical media
- 49 Spatial optical solitons
- 50 Laser heating of multilayer stacks
- Index
- References
Summary
The goal of ellipsometry is to determine the optical and structural constants of thin films and flat surfaces from the measurements of the ellipse of polarization in reflected or transmitted light. In the absence of birefringence and optical activity a flat surface, a single-layer film, or a thin-film stack may be characterized by the complex reflection coefficients rp = |rp|exp(iφrp) and rs = |rs|exp(iφrs) for p- and s-polarized incident beams, as well as by the corresponding transmission coefficients tp = |tp|exp(iφtp) and ts = |ts|exp(iφts).
Strictly speaking, an ellipsometer is a device that measures the complex ratios rp /rs and/or tp /ts. The amplitude ratios are usually deduced from the angles ψr and ψt, which are defined by tan ψr = |rp|/|rs| and tan ψt = |tp|/|ts|. In practice, measuring the individual reflectivities Rp = |rp|2, Rs = |rs|2 or transmissivities Tp = |tp|2, Ts = |ts|2 does not require much additional effort. Measuring the individual phases, of course, is difficult, but the relative phase angles φrp − φrs and φtp − φts can be readily obtained by ellipsometric methods. The values of Rp, Rs, φrp − φrs, ψr, Tp, Ts, φtp − φts and ψt may be measured as functions of the angle of incidence, θ, or as functions of the wavelength of the light, λ, or both.
The results of ellipsometric measurements are fed to a computer program that searches the space of unknown parameters to find agreement between the measured data points and theoretical calculations.
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- Classical Optics and its Applications , pp. 632 - 641Publisher: Cambridge University PressPrint publication year: 2009