Book contents
- Frontmatter
- Contents
- Acknowledgements
- 1 Introduction
- 2 Plasma dynamics and equilibrium
- 3 Bounded plasma
- 4 Radio-frequency sheaths
- 5 Single-frequency capacitively coupled plasmas
- 6 Multi-frequency capacitively coupled plasmas
- 7 Inductively coupled plasmas
- 8 Helicon plasmas
- 9 Real plasmas
- 10 Electrical measurements
- Appendix: Solutions to exercises
- References
- Index
2 - Plasma dynamics and equilibrium
Published online by Cambridge University Press: 04 April 2011
- Frontmatter
- Contents
- Acknowledgements
- 1 Introduction
- 2 Plasma dynamics and equilibrium
- 3 Bounded plasma
- 4 Radio-frequency sheaths
- 5 Single-frequency capacitively coupled plasmas
- 6 Multi-frequency capacitively coupled plasmas
- 7 Inductively coupled plasmas
- 8 Helicon plasmas
- 9 Real plasmas
- 10 Electrical measurements
- Appendix: Solutions to exercises
- References
- Index
Summary
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- Type
- Chapter
- Information
- Physics of Radio-Frequency Plasmas , pp. 18 - 58Publisher: Cambridge University PressPrint publication year: 2011