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6 - Silicon-based active plasmonic devices for on-chip integration

Published online by Cambridge University Press:  05 March 2014

Er-Ping Li
Affiliation:
A*STAR Institute of High Performance Computing, Singapore
Hong-Son Chu
Affiliation:
A*STAR Institute of High Performance Computing, Singapore
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Summary

Photonic devices integrated in Si optoelectronic circuits offer less power dissipation and larger bandwidth than those of electronic components, but suffer from a larger footprint due to the fundamental diffraction limit of light in dielectric waveguides and the weak optical response of Si. These two limitations may be overcome by utilizing plasmonics owing to the tight optical mode confinement in plasmonic waveguides. Besides the capability of miniaturization of photonic devices on the nanometer scale, plasmonics also provides the potential to design novel photonic devices due to the incorporation of metal and dielectrics. In this chapter, we present Si-based active plasmonic devices developed in our laboratory, including modulators and detectors. These active plasmonic devices can be seamlessly integrated into existing Si optoelectronic circuits using standard CMOS technology.

Introduction

Silicon photonics, in which photonic devices are fabricated on silicon-on-insulator (SOI) platforms using mature CMOS technology, has been well developed recently for high-performance Si electronic-photonic integration circuits (EPICs) [1]. In particular, integrated Si modulators and Ge-on-Si detectors with performances competitive with those of their counterparts based on III–V semiconductors have been demonstrated [2, 3]. However, due to the fundamental diffractive limit of light in dielectric waveguides as well as the weak optical response of Si, the Si photonic devices suffer from large footprints. For example, Mach–Zehnder-based Si modulators, which are mostly implemented in Si EPICs, require a millimeter–scale length to reach π phase shift.

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Publisher: Cambridge University Press
Print publication year: 2014

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References

[1] D. J., Lockwood and L., Pavesi, Silicon Photonics II: Components and Integration. Heidelberg: Springer-Verlag, 2011.
[2] G. T., Reed, G., Mashanovich, F. Y., Gardes, and D. J., Thomson, “Silicon optical modulators,” Nature Photonics, vol. 4, pp. 518–526, 2010.Google Scholar
[3] K. W., Ang, S. Y., Zhu, M. B., Yu, G. Q., Lo, and D. L., Kwong, “High-performance waveguided Ge-on-SOI metal–semiconductor–metal photodetectors with novel silicon–carbon (Si:C) Schottky barrier enhancement layer,” IEEE Photon. Technol. Lett., vol. 20, pp. 754–756, 2008.Google Scholar
[4] Q., Xu, D., Fattal, and R. G., Beausoleil, “Silicon microring resonators with 1. 5-μm radius,” Opt. Express, vol. 16, pp. 4306–4315, 2008.Google Scholar
[5] B., Guha, B. B. C., Kyotoku, and M., Lipson, “CMOS-compatible athermal silicon microring resonators,” Opt. Express, vol. 18, pp. 3487–3493, 2010.Google Scholar
[6] D. K., Gramotnev and S. I., Bozhevolnyi, “Plasmonics beyond the diffraction limit,” Nature Photonics, vol. 4, pp. 83–91, 2010.Google Scholar
[7] M. I., Stockman, “Nanoplasmonics: Past, present, and glimpse into future,” Opt. Express, vol. 19, pp. 22029–22106, 2011.Google Scholar
[8] M., Dragoman and D., Dragoman, “Plasmonics: Applications to nanoscale terahertz and optical devices,” Prog. Quant. Electron., vol. 32, pp. 1–41, 2008.Google Scholar
[9] E., Ozbay, “Plasmonics: Merging photonics and electronics at nanoscale dimensions,” Science, vol. 311, pp. 189–193, 2006.Google Scholar
[10] S. I., Bozhevolnyi and J., Jung, “Scaling for gap plasmon based waveguides,” Opt. Express, vol. 16, pp. 2676–2684, 2008.Google Scholar
[11] R. F., Oulton, V. J., Sorger, D. A., Genov, D. F. P., Pile, and X, Zhang, “A hybrid plasmonic waveguide for subwavelength confinement and long-range propagation,” Nature Photonics, vol. 2, pp. 496–500, 2008.Google Scholar
[12] T., Holmgaard and S. I., Bozhevolnyi, “Theoretical analysis of dielectric loaded surface plasmon-polariton waveguides,” Phys. Rev. B, vol. 75, pp. 245405–245416, 2007.Google Scholar
[13] A. V., Krasavin and N. I., Zheludev, “Active plasmonics: Controlling signals in Au/Ga waveguide using nanoscale structural transformations,” Appl. Phys. Lett., vol. 84, pp. 1416–1418, 2004.Google Scholar
[14] P., BeriniandI. D., Leon, “Surface plasmon-polariton amplifiers and lasers,” Nature Photonics, vol. 6, pp. 16–24, 2012.Google Scholar
[15] K. F., MacDonald and N. I., Zheludev, “Active plasmonics: Current status,” Laser Photo. Rev., vol. 6, pp. 562–567, 2010.Google Scholar
[16] P., Neutens, P. V., Dorpe, I. D., Vlaminck, L., Lagae, and G., Borghs, “Electrical detection of confined gap plasmons in metal–insulator–metal waveguides,” Nature Photonics, vol. 3, pp. 283–286, 2009.Google Scholar
[17] S. Y., Zhu, T. Y., Liow, G. O., Lo, and D. L., Kwong, “Fully complementary metal–oxide–semiconductor compatible nanoplasmonic slot waveguides for silicon electronic photonic integrated circuits,” Appl. Phys. Lett., vol. 98, pp. 021107–021109, 2011.Google Scholar
[18] S. Y., Zhu, G. O., Lo, and D. L., Kwong, “Experimental demonstration of vertical Cu–SiO2–Si hybrid plasmonic waveguide components on an SOI platform,” IEEE Photon. Technol. Lett., vol. 24, pp. 1224–1226, 2012.Google Scholar
[19] S. Y., Zhu, T. Y., Liow, G. O., Lo, and D. L., Kwong, “Silicon-based horizontal nanoplasmonic slot waveguides for on-chip integration,” Opt. Express, vol. 19, pp. 8888–8902, 2011.Google Scholar
[20] S. Y., Zhu, G. O., Lo, and D. L., Kwong, “Components for silicon plasmonic nanocir-cuits based on horizontal Cu–SiO2–Si–SiO2–Cu nanoplasmonic waveguides,” Opt. Express, vol. 20, pp. 5867–5881, 2012.Google Scholar
[21] S. Y., Zhu, G. O., Lo, and D. L., Kwong, “Performance of ultracompact copper-capped silicon hybrid plasmonic waveguide-ring resonators at telecom wavelengths,” Opt. Express, vol. 20, pp. 15232–15246, 2012.Google Scholar
[22] S. Y., Zhu, G. O., Lo, and D. L., Kwong, “Nanoplasmonic power splitters based on the horizontal nanoplasmonic slot waveguide,” Appl. Phys. Lett., vol. 99, pp. 031112–031114, 2011.Google Scholar
[23] J., Zhang, S. Y., Zhu, H., Zhanget al., “An ultracompact surface plasmonpolariton-effect-based polarization rotator,” IEEE Photon. Technol. Lett., vol. 23, pp. 1606–1608, 2011.Google Scholar
[24] J., Chee, S. Y., Zhu, G. O., Lo, and D. L., Kwong, “CMOS compatible polarization splitter using hybrid plasmonic waveguide,” Opt. Express, vol. 20, pp. 25345–25348, 2012.Google Scholar
[25] S. Y., Zhu, G. O., Lo, and D. L., Kwong, “Experimental demonstration of horizontal nanoplas-monic slot waveguide-ring resonators with submicrometer radius,” IEEE Photon. Technol. Lett., vol. 23, pp. 1896–1898, 2011.Google Scholar
[26] A., Tardella and J. N., Chazalviel, “Highly accumulated electron layer at a semiconductor/electrolyte interface,” Phys. Rev. B, vol. 32, pp. 2439–2448, 1985.Google Scholar
[27] R., Soref. R. E., Peale, and W., Buchwald, “Longwave plasmonics on doped silicon and silicides,” Opt. Express, vol. 16, pp. 6507–6514, 2008.Google Scholar
[28] S., Roberts, “Optical properties of copper,” Phys. Rev., vol. 118, pp. 1509–1514, 1960.Google Scholar
[29] S. Y., Zhu, G. O., Lo, and D. L., Kwong, “Electro-absorption modulation in horizontal metal–insulator–silicon–insulator–metal nanoplasmonic slot waveguides,” Appl. Phys. Lett., vol. 99, pp. 151114–151116, 2011.Google Scholar
[30] G. T., Reed, Silicon Photonics: The State of the Art. New York: John Wiley & Sons, 2008, Chapter 7.
[31] G., Gulsen and M. N., Inci, “Thermal optical properties of TiO2 films,” Opt. Mater., vol. 18, pp. 373–381, 2002.Google Scholar
[32] R., Paily, A., DasGupta, N., DasGuptaet al., “Pulsed laser deposition of TiO2 for MOS gate dielectric,” Appl. Surf. Sci., vol. 187, pp. 297–304, 2002.Google Scholar
[33] W., Bogaerts, P. D., Heyn, T. V., Vaerenberghet al., “Silicon microring resonators,” Laser Photo. Rev., vol. 6, pp. 47–73, 2012.Google Scholar
[34] D., Dai, Y., Shi, S., He, L., Wosinski, and L., Thylen, “Siliconhybrid plasmonic submicron-donut resonator with pure dielectric access waveguides,” Opt. Express, vol. 19, pp. 23671–23682, 2011.Google Scholar
[35] P., Bai, M. X., Gu, X. C., Wei, and E. P., Li, “Electrical detection of plasmonic waves using an ultra-compact structure via a nanocavity,” Opt. Express, vol. 17, pp. 24349–24357, 2009.Google Scholar
[36] L., Tang, S. E., Kocabas, S., Latifet al., “Nanometer-scale germanium photodetector enhanced by a near-infrared dipole antenna,” Nature Photonics, vol. 2, pp. 226–229, 2008.Google Scholar
[37] W. A., Cabanski and M. J., Schulz, “Electronic and IR-optical properties of silicide silicon interfaces,” Infrared Phys., vol. 32, pp. 29–44, 1991.Google Scholar
[38] C., Scales and P., Berini, “Thin-film Schottky barrier photodetector models,” IEEE J. Quant. Electron., vol. 46, pp. 633–643, 2010.Google Scholar
[39] S. Y., Zhu, M. B., Yu, G. O., Lo, and D. L., Kwong, “Near-infrared waveguide-based nickel silicide Schottky-barrier photodetector for optical communications,” Appl. Phys. Lett., vol. 92, pp. 081103–081105, 2008.Google Scholar
[40] S. Y., Zhu, G. O., Lo, M. B., Yu, and D. L., Kwong, “Silicide Schottky-barrier phototransistor integrated in silicon channel waveguide for in-line power monitoring,” IEEE Photon. Technol. Lett., vol. 21, pp. 185–187, 2009.Google Scholar
[41] A., Noya, M., Takeyama, K., Sasaki, and T., Nakanishi, “First phase nucleation of metal-rich silicide in Ta/Si systems,” J. Appl. Phys., vol. 76, pp. 3893–3895, 1994.Google Scholar
[42] J., Pelleg and N., Goldshleger, “Silicide formation in the Ta/Ti/Si system by reaction of codeposited Ta and Ti with Si (100) and Si (111) substrates,” J. Appl. Phys., vol. 85, pp. 1531–1539, 1999.Google Scholar
[43] C., Schwarz, U., Scharer, P., Sutteret al., “Application of epitaxial CoSi2/Si/CoSi2 heterostructures to tunable Schottky-barrier detectors,” J. Crystal Growth, vol. 127, pp. 659–662, 1993.Google Scholar
[44] C., Scales, I., Breukelaar, and P., Berini, “Surface-plasmon Schottky contact detector based on a symmetric metal strip in silicon,” Opt. Lett., vol. 35, pp. 529–531, 2010.Google Scholar
[45] R. W., Fathauer, J. M., Iannelli, C. W., Nieh, and S., Hashimoto, “Infrared response from metallic particles embedded in a single-crystal Si matrix: The layered internal photoemission sensor,” Appl. Phys. Lett., vol. 57, pp. 1419–1421, 1990.Google Scholar
[46] R. W., Fathauer, S. M., Dejewski, T., Georgeet al., “Infrared photodetectors with tailorable response due to resonant plasmon absorption in epitaxial silicide particles embedded in silicon,” Appl. Phys. Lett., vol. 62, pp. 1774–1776, 1993.Google Scholar
[47] F., Raissi, “A possible explanation for high quantum efficiency of PtSi/porous Si Schottky detectors,” IEEE Trans. Electron Devices, vol. 50, pp. 1134–1137, 2003.Google Scholar
[48] L. A., Sweatlock and K., Diest, “Vanadium dioxide based plasmonic modulators,” Opt. Express, vol. 20, pp. 8700–8709, 2012.Google Scholar
[49] V. J., Sorger, N. D., Lanzillotti-Kimura, R. M., Ma, and X., Zhang, “Ultra-compact silicon nanophotonic modulator with broadband response,” Nanophotonics, vol. 1, pp. 17–22, 2012.Google Scholar
[50] Q., Bao and K. P., Loh, “Graphene photonics, plasmonics, and broadband optoelectronic devices,” ACSNano, vol. 6, pp. 3677–3692, 2012.Google Scholar

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