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1 - Introduction to the focused ion beam system

Published online by Cambridge University Press:  12 January 2010

By
Nan Yao
Edited by
Nan Yao
Nan Yao
Affiliation:
Princeton University Princeton Institute for the Science and Technology of Materials Princeton, NJ 08540
Nan Yao
Affiliation:
Princeton University, New Jersey
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Summary

Introduction

The frontier of today's scientific and engineering research is undoubtedly in the realm of nanotechnology: the imaging, manipulation, fabrication, and application of systems at the nanometer scale. To maintain the momentum of current research and industrial progress, the continued development of new state of the art tools for nanotechnology is a clear necessity. In addition, knowledge and innovative application of these tools is in increasingly high demand as greater numbers of them come into use. The interdisciplinary field of materials science, in particular, perpetually seeks imaging and analysis on a smaller and smaller scale for a more complete understanding of materials structure–composition–processing–property relationships. Moreover, the ability to conduct material fabrication via precise micro- and nano-machining has become imperative to the progress of materials science and other fields relying on nanotechnology.

An important tool that has successfully met these challenges and promises to continue to meet future nanoscale demands is the focused ion beam (FIB) system. The technology offers the unsurpassed opportunities of direct micro- and nano-scale deposition or materials removal anywhere on a solid surface; this has made feasible a broad range of potential materials science and nanotechnology applications. There has naturally been great interest in exploring these applications, recently spurring the development of the two-beam FIB system, often also called DualBeam or CrossBeam, a new and more powerful tool that has advanced hand in hand with the complexity of new materials.

Type
Chapter
Information
Focused Ion Beam Systems
Basics and Applications
 , pp. 1 - 30
Publisher: Cambridge University Press
Print publication year: 2007

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  • Introduction to the focused ion beam system
    • By Nan Yao, Princeton University Princeton Institute for the Science and Technology of Materials Princeton, NJ 08540
  • Edited by Nan Yao, Princeton University, New Jersey
  • Book: Focused Ion Beam Systems
  • Online publication: 12 January 2010
  • Chapter DOI: https://doi.org/10.1017/CBO9780511600302.002
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  • Introduction to the focused ion beam system
    • By Nan Yao, Princeton University Princeton Institute for the Science and Technology of Materials Princeton, NJ 08540
  • Edited by Nan Yao, Princeton University, New Jersey
  • Book: Focused Ion Beam Systems
  • Online publication: 12 January 2010
  • Chapter DOI: https://doi.org/10.1017/CBO9780511600302.002
Available formats
×

Save book to Google Drive

To save content items to your account, please confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account. Find out more about saving content to Google Drive.

  • Introduction to the focused ion beam system
    • By Nan Yao, Princeton University Princeton Institute for the Science and Technology of Materials Princeton, NJ 08540
  • Edited by Nan Yao, Princeton University, New Jersey
  • Book: Focused Ion Beam Systems
  • Online publication: 12 January 2010
  • Chapter DOI: https://doi.org/10.1017/CBO9780511600302.002
Available formats
×