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5 - Dynamics of laser ablation

Published online by Cambridge University Press:  04 December 2009

Costas P. Grigoropoulos
By
S. Mao
Costas P. Grigoropoulos
Affiliation:
University of California, Berkeley
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Summary

Introduction

Various theoretical models have been proposed to describe material removal from a solid surface heated by laser irradiation. The thermal models of Afanas'ev and Krokhin (1967), Anisimov (1968), and Olstad and Olander (1975) represent early theoretical contributions to this problem. Chan and Mazumder (1987) developed a one-dimensional steady-state model describing the damage caused by vaporization and liquid expulsion due to laser–material interaction. Much of the above work was driven by laser applications such as cutting and drilling, and was thus focused primarily on modification of the target's morphology, with no particular interest in the detailed description of the properties and dynamics of the evaporated and ablated species. Moreover, these models dealt with continuous-wave (CW) laser sources, or relatively long (millisecond) time scales.

During the first stage of interaction between the laser pulse and the solid material, part of the laser energy is reflected at the surface and part of the energy is absorbed within a short penetration depth in the material. The energy absorbed is subsequently transferred deeper into the interior of the target by heat conduction. At a later stage, if the amount of laser energy is large enough (depending upon the pulse length, intensity profile, wavelength, and thermal and radiative properties of the target material), melting occurs and vaporization follows. The vapor generated can be ionized, creating high-density plasma that further absorbs the incident laser light. Effects of this laser-plasma shielding have been shown via the simplified one-dimensional model of Lunney and Jordan (1998).

Type
Chapter
Information
Transport in Laser Microfabrication
Fundamentals and Applications
 , pp. 109 - 145
Publisher: Cambridge University Press
Print publication year: 2009

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References

Aden, M., Beyer, E., and Herziger, G., 1990, “Laser-Induced Vaporization of Metal as a Riemann Problem,” J. Phys. D, 23, 655–661.CrossRefGoogle Scholar
Aden, M., Beyer, E., Herziger, G., and Kunze, H., 1992, “Laser-Induced Vaporization of a Metal Surface,” J. Phys. D, 25, 57–65.CrossRefGoogle Scholar
Afanas'ev, Y. V., and Krokhin, O. N., 1967, “Vaporization of Matter Exposed to Laser Emission,” Sov. Phys. JETP, 25, 639–645.Google Scholar
Amoruso, S., Toftman, B., and Schou, J., 2004, “Thermalization of a UV Laser Ablation Plume in a Background Gas: From a Directed to a Diffusionlike Flow,” Phys. Rev. B, 69, 056403.CrossRefGoogle Scholar
Anisimov, S. I., 1968, “Vaporization of Metal Absorbing Laser Radiation,” Sov. Phys. JETP, 27, 182–183.Google Scholar
Boccara, A. C., Fournier, D., and Badoz, J., 1980, “Thermo-Optical Spectroscopy: Detection by the ‘Mirage Effect,’” Appl. Phys. Lett., 36, 130–132.CrossRefGoogle Scholar
Bogaerts, A., Chen, Z. Y., Gijbels, R., and Vertes, A., 2003, “Laser Ablation for Analytical Sampling: What Can We Learn from Modeling,” Spectrochim. Acta B: Atom. Spectrosc., 58 1867–1893.CrossRefGoogle Scholar
Bogaerts, A., and Chen, Z. Y., 2005, “Effect of Laser Parameters on Laser Ablation and Laser-Induced Plasma Formation: A Numerical Modeling Investigation,” Spectrochim. Acta B: Atom. Spectrosc., 60, 1280–1307.CrossRefGoogle Scholar
Capewell, D. L., and Goodwin, D. G., 1995, “Monte Carlo Simulations of Reactive Pulsed Laser Deposition,” Proc. SPIE, 2403, 49–59.CrossRefGoogle Scholar
Capitelli, M., Capitelli, F., and Eletskii, A., 2000, “Non-equilibrium and Equilibrium Problems in Laser-induced Plasmas,” Spectrochim. Acta B: Atom. Spectrosc., 55, 559–574.CrossRefGoogle Scholar
Chan, C. L., and Mazumder, J. E., 1987, “One-Dimensional Steady-State Model for Damage by Vaporization and Liquid Expulsion due to Laser–Material Ablation,” J. Appl. Phys., 62, 4579–4586.CrossRefGoogle Scholar
Chen, G., and Yeung, E. S., 1988, “A Spatial and Temporal Probe for Laser-Generated Plumes Based on Density Gradients,” Anal. Chem., 60, 864–865.CrossRefGoogle Scholar
Chen, K. R., Leboeuf, J. N., Wood, R. F.et al., 1995, “Accelerated Expansion of Laser-Ablated Materials near a Solid Surface,” Phys. Rev. Lett., 75, 4706–4709.CrossRefGoogle Scholar
Chen, K. R., Leboeuf, J. N., Wood, R. F.et al., 1996, “Mechanisms Affecting Kinetic Energies of Laser-Ablated Materials,” J. Vac. Sci. Technol. A, 14, 1111–1114.CrossRefGoogle Scholar
Chen, Z. Y., and Bogaerts, A., 2005, “Laser Ablation of Cu and Plume Expansion into 1 atm Ambient Gas, J. Appl. Phys., 97, 063305.CrossRefGoogle Scholar
Chu, S. C., and Grigoropoulos, C. P., 2000, “Determination of Kinetic Energy Distribution in a Laser-Ablated Titanium Plume by Emission and Laser-Induced Fluorescence Spectroscopy,” J. Heat Transfer, 122, 771–775.CrossRefGoogle Scholar
Clark, T. R., and Milchberg, H. M., 1997, “Time- and Space-Resolved Density Evolution of the Plasma Waveguide,” Phys. Rev. Lett., 78, 2373–2376.CrossRefGoogle Scholar
Cools, J. C. S., 1993, “Monte Carlo Simulations of the Transport of Laser-Ablated Atoms of a Diluted Gas,” J. Appl. Phys., 74, 6401–6406.CrossRefGoogle Scholar
Diaci, J., 1992, “Response Functions of the Laser Beam Deflection Probe for Detection of Spherical Acoustic Waves,” Rev. Sci. Instrum., 63, 5306–5310.CrossRefGoogle Scholar
Dreyfus, R. W., 1993, “Interpreting Laser Ablation Using Cross-Sections,” Surface Sci., 23, 177–181.CrossRefGoogle Scholar
Enloe, C. L., Gilgenbach, R. M., and Meachum, J. S., 1987, “A Fast, Sensitive Laser Deflection System Suitable for Transient Plasma Analysis,” Rev. Sci. Instrum., 58, 1597–1600.CrossRefGoogle Scholar
Finke, B. R., and Simon, G., 1990, “On the Gas Kinetics of Laser-Induced Evaporation of Metals,” J. Phys. D, 23, 67–74.CrossRefGoogle Scholar
Finke, B. R., Finke, M., Kapadia, P. D., Dowden, J. M., and Simon, G., 1990a, “Numerical Investigation of the Knudsen Layer, Appearing in the Laser-Induced Evaporation of Metals,” Proc. SPIE, 1279, 127–134.CrossRefGoogle Scholar
Finke, B. R., Kapadia, P. D., and Dowden, J. M., 1990b, “A Fundamental Plasma Based Model for Energy Transfer in Laser Material Processing,” J. Phys. D, 23, 643–654.CrossRefGoogle Scholar
Garrelie, E., Champeaux, C., and Catherinot, A., 1999, “Study by a Monte Carlo Simulation of the Influence of a Background Gas on the Expansion Dynamics of a Laser-Induced Plasma Plume,” Appl. Phys. A, 69, 45–50.CrossRefGoogle Scholar
Geohegan, D. B., 1992, “Fast Intensified-CCD Photography of YBa2Cu3O7−x Laser Ablation in Vacuum and Ambient Oxygen,” Appl. Phys. Lett., 60, 2732–2734.CrossRefGoogle Scholar
Geohegan, D. B., Puretzky, A. A., Duscher, G., and Pennycook, S. J., 1998, “Time-Resolved Imaging of Gas Phase Nanoparticle Synthesis by Laser Ablation,” Appl. Phys. Lett., 72, 2987–2989.CrossRefGoogle Scholar
Girault, C., Damiani, D., Aubreton, J., and Catherinot, A., 1989, “Time-Resolved Spectroscopic Study of the KrF Laser-Induced Plasma Plume Created above an YBaCuO Superconducting Target,” Appl. Phys. Lett., 55, 182–184.CrossRefGoogle Scholar
Gusarov, A. V., Gnedovets, A. G., and Smurov, I., 2000, “Gas Dynamics of Laser Ablation: Influence of Ambient Atmosphere,” J. Appl. Phys., 88, 4352–4364.CrossRefGoogle Scholar
Gusarov, A. V., and Smurov, I., 2003, “Near-Surface Laser–Vapour Coupling in Nanosecond Pulsed Laser Ablation,” J. Phys. D, 36, 2962–2971.CrossRefGoogle Scholar
Ho, J.-R., Grigoropoulos, C. P., and Humphrey, J. A. C., 1995, “Computational Model for the Heat Transfer and Gas Dynamics in the Pulsed Laser Evaporation of Metals,” J. Appl. Phys., 78, 4696–4709.CrossRefGoogle Scholar
Ho, J.-R., Grigoropoulos, C. P., and Humphrey, J. A. C., 1996, “Gas Dynamics and Radiation Heat Transfer in Excimer Laser Ablation of Aluminum,” J. Appl. Phys., 79, 7205–7215.CrossRefGoogle Scholar
Itina, T. E., Marine, W., and Autric, M., 1997, “Monte Carlo Simulation of Pulsed Laser Ablation from Two-Component Target into Diluted Ambient Gas,” J. Appl. Phys., 82, 3536–3542.CrossRefGoogle Scholar
Jahoda, F. C., and Sawyer, G. A., 1971, Methods of Experimental Physics, Lovberg, R. H. and Greim, H. R., eds., Vol. 9B, New York, Academic Press.Google Scholar
Kelly, R., 1990, “On the Dual Role of the Knudsen Layer and Unsteady, Adiabatic Expansion in Pulse Sputtering Phenomena,” J. Chem. Phys., 92, 5047–5056.CrossRefGoogle Scholar
Kelly, R., and Dreyfus, R. W., 1988a, “Reconsidering the Mechanisms of Laser Sputtering with Knudsen-Layer Formation Taken into Account,” Nucl. Instrum. Meth. Phys. Res. B, 32, 341–345.CrossRefGoogle Scholar
Kelly, R., and Dreyfus, R. W., 1988b, “On the Effect of Knudsen-Layer Formation on Studies of Vaporization, Sputtering and Desorption,” Surf. Sci., 198, 263–276.CrossRefGoogle Scholar
Kelly, R., and Rothenberg, J. E., 1985, “Laser Sputtering: Part III. The Mechanism of the Sputtering of Metals at Low Energy Densities,” Nucl. Instrum. Meth. Phys. Res. B, 7/8, 755–763.CrossRefGoogle Scholar
Kruer, W. L., 1988, The Physics of Laser Plasma Interactions, Redwood City, CA, Addison-Wesley.Google Scholar
Leboeuf, J. N., Chen, K. R., Donato, J. M.et al., 1996, “Modeling of Plume Dynamics in Laser Ablation Processes for Thin Film Deposition of Materials,” Phys. Plasmas, 3, 2203–2209.CrossRefGoogle Scholar
Li, Y. M., Broughton, J. N., Fedosejevs, R., and Tomie, T., 1992, “Formation of Plasma Columns in Atmospheric Pressure Gases by Picosecond KrF Laser Pulses,” Opt. Commun., 93, 366–377.CrossRefGoogle Scholar
Lowndes, D. H., Geohegan, D. B., Puretzky, A. A., Norton, D. P., and Rouleau, C. M., 1996, “Synthesis of Novel Thin-Film Materials by Pulsed Laser Deposition,” Science, 273, 898–903.CrossRefGoogle ScholarPubMed
Lunney, J. G., and Jordan, R., 1998, “Pulsed Laser Ablation of Metals,” Appl. Surf. Sci., 127–129, 941–946.CrossRefGoogle Scholar
Mao, S. S., Mao, X., Greif, R., and Russo, R. E., 2000a, “Dynamics of an Air Breakdown Plasma on a Solid Surface during Picosecond Laser Ablation,” Appl. Phys. Lett., 76, 31–33.CrossRefGoogle Scholar
Mao, S. S., Mao, X., Greif, R., and Russo, R. E., 2000b, “Simulation of a Picosecond Laser Ablation Plasma,” Appl. Phys. Lett., 76, 3370–3372.CrossRefGoogle Scholar
Murnane, H. M., Kapteyn, H. C., Rosen, M. D., and Falcone, R. W., 1991, “Ultrafast X-Ray Pulses from Laser-Produced Plasmas,” Science, 251, 531–536.CrossRefGoogle ScholarPubMed
Olstad, R. A., and Olander, D. R., 1975, “Evaporation of Solids by Laser Pulses, I. Iron,” J. Appl. Phys., 46, 1499–1505.CrossRefGoogle Scholar
Park, H. K., Grigoropoulos, C. P., and Tam, A. C., 1995, “Optical Measurements of Thermal Diffusivity of a Material,” Int. J. Thermophys., 16, 973–995.CrossRefGoogle Scholar
Petite, G., Agostini, P., Trainham, R. P., Mevel, E., and Martin, P., 1992, “Origin of the High-Energy Electron Emission from Metals under Laser Irradiation,” Phys. Rev. B, 45, 12 210–12 217.CrossRefGoogle ScholarPubMed
Phipps, C. R. Jr., and Dreyfus, R. W., 1993, “The High Laser Irradiance Regime,” in Laser Ionization Mass Analysis, edited by Vertes, A., Gijbels, R., and Adams, F., New York, John Wiley and Sons, pp. 369–431.Google Scholar
Phipps, C. R. Jr., Turner, T. P., Harrison, R. F.et al., 1988, “Impulse Coupling to Targets in Vacuum by KrF, HF, and CO2 Single-Pulse Lasers,” J. Appl. Phys., 64, 1083–1096.CrossRefGoogle Scholar
Russo, R. E., 1995, “Laser Ablation,” Appl. Spectrosc., 49, A14–A25.CrossRefGoogle Scholar
Schittenhelm, H., Gallies, G., Straub, A., Berger, P., and Hügel, H., 1998, “Measurements of Wavelength-Dependent Transmission in Excimer Laser-Induced Plasma Plumes and their Interpretation,” J. Phys. D, 31, 418–427.CrossRefGoogle Scholar
Sedov, L. I., 1959, Similarity and Dimensional Methods in Mechanics, New York, Academic Press.Google Scholar
Sell, J. A., Heffelfinger, D. M., Ventzek, P. L. G., and Gilgenbach, R. M, 1991, “Photoacoustic and Photothermal Beam Deflection as a Probe of Laser Ablation of Materials,” J. Appl. Phys., 69, 1330–1336.CrossRefGoogle Scholar
Shannon, M. A., Rostami, A. A., and Russo, R. E., 1992, “Photothermal Deflection Measurements for Monitoring Heat Transfer During Modulated Laser Heating of Solids,” J. Appl. Phys., 71, 53–63.CrossRefGoogle Scholar
Shannon, M. A., Rubinsky, B., and Russo, R. E., 1994, “Detecting Laser-Induced Phase Change at the Surface of Solids via Latent Heat of Melting with a Photothermal Deflection Technique,” J. Appl. Phys., 75, 1473–1485.CrossRefGoogle Scholar
Sibold, D., and Urbassek, H. M., 1991, “Kinetic Study of Pulsed Desorption Flows into Vacuum,” Phys. Rev. A, 43, 6722–6734.CrossRefGoogle ScholarPubMed
Siegel, R., and Howell, J. R., 1992, Thermal Radiation Heat Transfer, 3rd edn, Bristol, PA, Hemisphere.Google Scholar
Sigrist, M. W., 1986, “Laser Generation of Acoustic Waves in Liquids and Gases,” J. Appl. Phys., 60, R83–R121.CrossRefGoogle Scholar
Singh, R. K., and Narayan, J., 1990, “Pulsed-Laser Evaporation Technique for Deposition of Thin Films: Physics and Theoretical Model,” Phys. Rev. B, 41, 8843–8859.CrossRefGoogle ScholarPubMed
Spitzer, L. Jr., 1962, Physics of Fully Ionized Gases, New York, John Wiley Interscience.Google Scholar
Tam, A. C., 1986, “Applications of Photoacoustic Sensing Techniques,” Rev. Mod. Phys., 58, 381–431.CrossRefGoogle Scholar
Vertes, A., Gijbels, R., and Adams, F. eds., 1993, Laser Ionization Mass Analysis, New York, John Wiley.
Vertes, A., Juhasz, P., Wolf, M., and Gijbels, R., 1989, “Hydrodynamic Modeling of Laser Plasma Ionization Processes,” Int. J. Mass Spectrosc. Ion Processes, 94, 63–85.CrossRefGoogle Scholar
Young, P. E., Baldis, H. A., Drake, R. P., Cambell, E. M., and Estabrook, K. G., 1998, “Evidence of Ponderomotive Filamentation in Laser Produced Plasma,” Phys. Rev. Lett., 61, 2336–2339.CrossRefGoogle Scholar
Zel'dovich, Ya. B., and Raizer, Yu. B., 1966, Physics of Shock Waves and High-Temperature Hydrodynamic Phenomena, New York, Academic Press.Google Scholar
Zhigilei, L. V., 2003, “Dynamics of the Plume Formation and Parameters of the Ejected Clusters in Short-Pulse Laser Ablation,” Appl. Phys. A, 76, 339–350.CrossRefGoogle Scholar
Zhigilei, L. V., Kodali, P. B. S., and Garrison, B. J., 1997, “Molecular Dynamics Model for Laser Ablation and Desorption of Organic Solids,” J. Phys. Chem. B, 101, 2028–2037.CrossRefGoogle Scholar

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